Controlled nanodot fabrication by rippling polycarbonate surface using an AFM diamond tip

Ya, Yan; Sun, Yang; Li, Jiran; Hu, Zhenjiang; Zhao, Xuesen

doi:10.1186/1556-276x-9-372

Cited by 37 publications

(24 citation statements)

References 16 publications

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“…This effect is not seen in the simulations, leading to vertical ripples in case of bidirectional scanning, Fig. 7(a), which has been also reported experimentally, when the lines are alternately scanned forward and backward [22]. A possible explanation is that the stiffness beneath the tip apex is changed when the polymer is scraped, which would introduce a substantial asymmetry when the tip follows precisely the same path on the way back.…”

Section: Fig 4 (A) Detail Pattern Insupporting

confidence: 49%

Plowing-Induced Structuring of Compliant Surfaces

et al. 2019

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The structures produced by a sharp tip scraping a compliant surface are modeled in the illustrative case of scan patterns formed by a series of parallel lines. This is made possible by a modified version of the Prandtl model for stick-slip friction, with an interaction energy landscape replicating the morphology of the evolving surface. As a result, a ripple motif emerges with a tilt angle increasing linearly with the distance between the scan lines, except for the region close to the left boundary of the scanned area, where the ripples are oriented at 90°. This region can penetrate considerably to the right, forming a complex branched pattern. These predictions are substantiated by atomic force microscopy nanolithography experiments on polystyrene surfaces at room temperature. A simple and robust theoretical protocol for reproducing earlystage wear processes (potentially going beyond single contacts) is thus made available.

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Section: Fig 4 (A) Detail Pattern Insupporting

confidence: 49%

Plowing-Induced Structuring of Compliant Surfaces

et al. 2019

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“…Thus, the orientation of nanodots can be controlled by a combination of different scratching directions, and various forms of nanodots can be fabricated with controlled height and length. It is also worth stating that the method presented here avoids adjusting the scratching parameters between the different layers to achieve specific feature sizes, as was done in [16]. In addition, the method does not require the sample orientation to be changed for producing such arrays of nanodots as was implemented in [25].…”

Section: Controlled Nanodot Fabrication With Arbitrary Orientationmentioning

confidence: 99%

“…Moreover, AFM can fabricate features on most materials. AFM nanolithography has two modes, namely static and dynamic plowing lithography (DPL), which are derived from contact [12][13][14][15][16][17] and tapping scanning modes [18][19][20][21], respectively. In static plowing lithography, which is also known as AFM scratching, the probe tip applies a constant normal force on the surface of the sample to be processed.…”

Section: Introductionmentioning

confidence: 99%

“…However, the shape, period, and depth of such nanostructures that are produced using this approach are dependent on the scratching direction, which make the process difficult to control. Nanoscale wrinkles could also be made on some polymer materials such as polycarbonate along the scratching direction defined by the tip [16]. These were referred to as nano-bundles and previous work sought solutions to control their shape and periodicity [17].…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope

Yan

Geng

et al. 2018

Applied Surface Science

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The fabrication of periodic nanostructures with a fine control of their dimensions is performed on poly(methyl methacrylate) (PMMA) thin films using an atomic force microscope technique called dynamic plowing lithography (DPL). Different scratching directions are investigated first when generating single grooves with DPL. In particular, the depth, the width and the periodicity of the machined grooves as well the height of the pileup , formed on the side of the grooves, are assessed. It was found that these features are not significantly affected by the scratching direction, except when processing took place in a direction away from the cantilever probe and parallel to its main axis. For a given scratching direction, arrays of regular grooves are then obtained by controlling the feed, i.e. the distance between two machining lines. A scan-scratch tip trace is also used to reduce processing time and tip wear. However, irregular patterns are created when combining two layers oriented at different angles and where each layer defines an array of grooves. Thus, a "combination writing" method was implemented to fabricate arrays of grooves with a well-defined wavelength of 30 nm, which was twice the feed value utilized. Checkerboard, diamond-shaped, and hexagonal nanodots were also fabricated. These were obtained by using the combination writing method and 2 by varying the orientation and the number of layers. The density of the nanodots achieved could be as high as 1.9×10 9 nanodots per mm 2 .

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“…1 One of the approaches to achieve this end is atomic force microscopy (AFM)-based machining, where a force is applied via a sufficiently stiff AFM probe to mechanically remove material locally from the sample. [2][3][4] Also referred to as mechanical scanning probe lithography or nanomechanical machining, this technique has been utilised in a number of recent studies to, e.g., fabricate complex arrays of 3D nanodots on polymer polycarbonate samples 5 and nanochannels of varying depth in silicon, 6 reproduce photographs on a polished aluminium disk, 7 and form single photon emitters via nanoindentations on a polymer film. 8 The analysis of AFMbased machining behaviour has been utilised to characterise the hardness of materials in nanoscale sclerometry measurements, 9 and AFM-based machining has also been used to precisely remove material from regions of the sample surface in tomography investigations.…”

Section: Introductionmentioning

confidence: 99%

Investigation of AFM-based machining of ferroelectric thin films at the nanoscale

Zhang

Edwards

Deng

et al. 2020

Journal of Applied Physics

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Atomic force microscopy (AFM) has been utilised for nanomechanical machining of various materials including polymers, metals, and semiconductors. Despite being important candidate materials for a wide range of applications including data storage and actuators, ferroelectric materials have rarely been machined via AFM. AFM-based machining of ferroelectric nanostructures offers advantages over established techniques, such as bottom-up approaches and focussed ion beam milling, in select cases where low damage and low-cost modification of alreadyfabricated thin films are required. Through a systematic investigation of a broad range of AFM parameters, we demonstrate that AFM-based machining provides a low-cost option to rapidly modify local regions of the film, as well as fabricate a range of different nanostructures, including a nanocapacitor array with individually addressable ferroelectric elements.

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Controlled nanodot fabrication by rippling polycarbonate surface using an AFM diamond tip

Cited by 37 publications

References 16 publications

Plowing-Induced Structuring of Compliant Surfaces

Plowing-Induced Structuring of Compliant Surfaces

Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope

Investigation of AFM-based machining of ferroelectric thin films at the nanoscale

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