2011
DOI: 10.1039/c1cs15045f
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Controlled growth of single-walled carbon nanotubes on patterned substrates

Abstract: Single-walled carbon nanotubes (SWCNTs) have attracted great interest in the last two decades because of their unique electrical, optical, thermal, mechanical properties, etc. One major research field of SWCNTs is the controlled growth of them from the patterned catalysts on substrates, since the integration of SWCNTs into nanoelectronics and other devices requires well-organized SWCNT arrays. This tutorial review describes the commonly used lithographic techniques to pattern catalysts used for controlled grow… Show more

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Cited by 35 publications
(27 citation statements)
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References 57 publications
(70 reference statements)
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“…136,281 On the other hand, in situ growth approach produces aligned CNTs during growth using controlled CVD processes, including gas flow directed growth, 282290 external field directed growth, 232,291292 , and surface-directed growth. 25,293297 These in situ aligned growth methods have the advantage of avoiding defects induced during post-assembly, and can be combined with the standard fabrication of silicon-based devices.…”
Section: Nanostructure Building Blocks and Nanotransistorsmentioning
confidence: 99%
“…136,281 On the other hand, in situ growth approach produces aligned CNTs during growth using controlled CVD processes, including gas flow directed growth, 282290 external field directed growth, 232,291292 , and surface-directed growth. 25,293297 These in situ aligned growth methods have the advantage of avoiding defects induced during post-assembly, and can be combined with the standard fabrication of silicon-based devices.…”
Section: Nanostructure Building Blocks and Nanotransistorsmentioning
confidence: 99%
“…13,2228 The outstanding mechanical and unique physical properties of individual CNTs have motivated the development of macrostructures based on CNTs, such as CNT arrays, films and fibers. 2931 Such composite materials can be handled more conveniently than individual CNT and are therefore the attractive candidates for microelectrode materials. 32,33 …”
mentioning
confidence: 99%
“…The second important characteristic is that the surface patterning of polymer coatings can be readily realized by many lithographic techniques, such as photolithography, contact printing, and scanning probe lithography. [65][66][67][68][69][70][71][72][73][74] With the advantage of site selectivity in the ELD process, one can fabricate highly integrated electronic devices on flexible and stretchable substrates with patterned, surface-grafted polymer templates.…”
Section: Discussionmentioning
confidence: 99%