Controllable phase formation and physical properties of yttrium oxide films governed by substrate heating and bias voltage

Lei, Pei; Dai, Bing; Zhu, Jiaqi; Chen, Xiaoting; Liu, Gang; Zhu, Yuankun; Han, Jiecai

doi:10.1016/j.ceramint.2015.03.165

Cited by 22 publications

(10 citation statements)

References 42 publications

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“…In addition, the Y 2 O 3 film inspected in our study exhibits a relatively high dispersion of the refractive index, which is larger in order of magnitude than that reported in the literature for other Y 2 O 3 films. It is known that refractive index is related to the porosity and packing density of a material [ 30 ]. One can estimate the porosity ( P ) and packing density (

) of the film using the known Lorentz–Lorenz expression [ 31 ]:

where

and

denote the refractive index of the film and the bulk material, respectively.…”

Section: Resultsmentioning

confidence: 99%

Exciton Luminescence and Optical Properties of Nanocrystalline Cubic Y2O3 Films Prepared by Reactive Magnetron Sputtering

et al. 2022

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This paper presents a comprehensive study of the energy structure, optical characteristics, and spectral-kinetic parameters of elementary excitations in a high-purity nanocrystalline cubic Y2O3 film synthesized by reactive magnetron sputtering. The optical transparency gaps for direct and indirect interband transitions were determined and discussed. The dispersion of the refractive index was established based on the analysis of interference effects. It was found that the refractive index of the Y2O3 film synthesized in this study is higher in order of magnitude than that of the films obtained with the help of other technologies. The intrinsic emission of Y2O3 film has been discussed and associated with the triplet–singlet radiative relaxation of self-trapped and bound excitons. We also studied the temperature behavior of the exciton luminescence of Y2O3 for the first time and determined thermal activation barriers. The optical energy and kinetic parameters of cubic Y2O3 films were analyzed in comparison with those of the monoclinic films of yttrium oxide. The main difference between the optical properties of cubic and monoclinic Y2O3 films was established, which allowed for a supposition of their application prospects.

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) of the film using the known Lorentz–Lorenz expression [ 31 ]:

where

and

denote the refractive index of the film and the bulk material, respectively.…”

Section: Resultsmentioning

confidence: 99%

Exciton Luminescence and Optical Properties of Nanocrystalline Cubic Y2O3 Films Prepared by Reactive Magnetron Sputtering

et al. 2022

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“…In this experiment, the transmittance of the La2O3 thin film deposited on a quartz substrate was measured in the UV range. Using the Tauc formula, the relationship between (αhυ) 2 and hυ was obtained, and the bandgap width was calculated [45,46]:…”

Section: Energy Level Characterizationmentioning

confidence: 99%

Effect of Annealing Temperature on the Structure and Properties of La2O3 High-K Gate Dielectric Films Prepared by the Sol-Gel Method

Tuokedaerhan

Cai

et al. 2023

Coatings

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This article presents the sol-gel method for depositing La2O3 thin films on n-type Si substrates and quartz substrates, and investigates the impact of annealing temperature on the microcomposition, surface morphology, optical properties, and band characteristics of the films. X-ray diffraction (XRD) analysis indicates that the films are amorphous below 500 °C, with annealing resulting in a hexagonal-phase La2O3 (h-a2O3) and new non-hydrated impurities. Fourier-transform infrared (FTIR) analysis reveals that the prepared La2O3 film is unaffected by moisture. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) provide evidence that the La2O3 film has a smooth, uniform surface without cracks. The roughness increases from 0.426 nm to 1.200 nm, and the film thins from 54.85 nm to 49.80 nm as the annealing temperature rises. The film’s transmittance is above 75%, as measured by UV-Vis, and the calculated optical bandgap increases from 5.11 eV to 5.75 eV. The calculated band offset of the La2O3 film is greater than 1 eV, which meets the minimum requirements for MOS devices, thus providing promising prospects for La2O3 films in MOS applications.

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“…Yttrium oxide (Y 2 O 3 ) has excellent physical and chemical properties, which mean that it is widely used in semiconductor devices, nuclear engineering, and optical applications [1][2][3][4][5][6][7][8]. As a rare earth oxide, the contact angle of water on the Y 2 O 3 surface can be above 90 • , providing a hydrophobic [9][10][11][12] or even a super-hydrophobic surface due to the special electronic structures [13,14]. Compared to hydrophobic polymers, inorganic metal oxide hydrophobic coatings possess better mechanical durability and thermal stability [13], which make Y 2 O 3 a promising coating material in harsh environments.…”

Section: Introductionmentioning

confidence: 99%

“…For thin films, depending on the deposition process, the surface chemical environment and roughness can affect the surface wetting properties significantly [15]. Lei et al [9] have obtained a series of hydrophobic Y 2 O 3 thin films, and found that the film with the lowest water contact angle had a lower oxygen content. Oxygen vacancies are easily formed in an oxygen-deficient environment, and are kinetically more favorable for the attachment of OH − , thereby making the surface more hydrophilic.…”

Section: Introductionmentioning

confidence: 99%

Effects of the Deposition Mode and Heat Treatment on the Microstructure and Wettability of Y2O3 Coatings Prepared by Reactive Magnetron Sputtering

Huang

2022

Coatings

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A robust hydrophobic Y2O3 coating at high temperatures is important for industrial applications. In this study, Y2O3 thin films on Si substrates were prepared by reactive direct current magnetron sputtering. By changing the deposition power, Y2O3 thin films with different microstructures were obtained in poison mode and metallic mode, respectively. In order to understand the effect of heat treatment on the microstructure and hydrophobicity of Y2O3, the samples were annealed at 400 °C in the air. Compared to metallic mode, no crack was formed on the surface of the Y2O3 film prepared in poison mode. In addition, the water contact angle on the surface of the Y2O3 thin film deposited in poison mode was above 90° before and after annealing at 400 °C. It has been demonstrated that the initial high concentration of physically absorbed oxygen and its slow desorption process in a Y2O3 thin film prepared in poison mode contributes to the hydrophobicity of the thin film at high temperatures. These results can provide insights into the large-scale fabrication of hydrophobic Y2O3 coatings for high-temperature applications.

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Controllable phase formation and physical properties of yttrium oxide films governed by substrate heating and bias voltage

Cited by 22 publications

References 42 publications

Exciton Luminescence and Optical Properties of Nanocrystalline Cubic Y2O3 Films Prepared by Reactive Magnetron Sputtering

Exciton Luminescence and Optical Properties of Nanocrystalline Cubic Y2O3 Films Prepared by Reactive Magnetron Sputtering

Effect of Annealing Temperature on the Structure and Properties of La2O3 High-K Gate Dielectric Films Prepared by the Sol-Gel Method

Effects of the Deposition Mode and Heat Treatment on the Microstructure and Wettability of Y2O3 Coatings Prepared by Reactive Magnetron Sputtering

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