2016
DOI: 10.1038/srep19314
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Controllable electrical and physical breakdown of poly-crystalline silicon nanowires by thermally assisted electromigration

Abstract: The importance of poly-crystalline silicon (poly-Si) in semiconductor manufacturing is rapidly increasing due to its highly controllable conductivity and excellent, uniform deposition quality. With the continuing miniaturization of electronic components, low dimensional structures such as 1-dimensional nanowires (NWs) have attracted a great deal of attention. But such components have a much higher current density than 2- or 3- dimensional films, and high current can degrade device lifetime and lead to breakdow… Show more

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Cited by 12 publications
(3 citation statements)
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References 30 publications
(33 reference statements)
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“…For instance, Cu, Ag, Au, or carbon nanotubes can carry a current density of 2 × 10 6 Acm –2 or it can be even higher at room temperature. However, semiconducting materials are rarely reported to show such a high current-carrying capacity. Interestingly, we find that α-Bi 4 Br 4 nanobelts exhibit a high current-carrying capacity while keeping a nonmetallic feature. We attribute the high current-carrying capacity to the huge amount of edge states that the α-Bi 4 Br 4 nanobelts possess.…”
Section: Resultsmentioning
confidence: 69%
“…For instance, Cu, Ag, Au, or carbon nanotubes can carry a current density of 2 × 10 6 Acm –2 or it can be even higher at room temperature. However, semiconducting materials are rarely reported to show such a high current-carrying capacity. Interestingly, we find that α-Bi 4 Br 4 nanobelts exhibit a high current-carrying capacity while keeping a nonmetallic feature. We attribute the high current-carrying capacity to the huge amount of edge states that the α-Bi 4 Br 4 nanobelts possess.…”
Section: Resultsmentioning
confidence: 69%
“…To distinguish the difference, the voltage-resolved I–V relationship measured in a vacuum on a fresh device is shown in Figure S8c. The second and following sweeps exhibit the increment in current before a sudden drop, which is a typical feature of electromigration and opposite the decrease in current featured by the current-induced oxidation operated in air. Since oxygen is lacking in a vacuum, the local Joule heating assists the electromigration instead of oxidation and cuts the Cu nanobelt as shown in Figure S8d.…”
Section: Resultsmentioning
confidence: 94%
“…The values for the poly-Si, which is the most resistive are 1, 0.6, and 0.16 MA/cm 2 for the fully-clad, trenched, and undercut configurations, respectively. These values are well below the reverse annealing point (1.5 MA/cm 2 ), transition point (3 MA/cm 2 ) and breakdown point (6 MA/cm 2 ) reported in [44] for a similar poly-Si resistor. Note, however, these limits depend on structural properties of the material (grain size), that are particular to each fabrication process.…”
Section: Heating Element Designmentioning
confidence: 44%