Control of the radio-frequency wave form at the chuck of an industrial oxide-etch reactor

Berry, L.A.; Maynard, Helen; Miller, Paul A.; Moore, T.; Pendley, Michael; Resta, Victoria; Sparks, D. O.; Yang, Quingyun

doi:10.1116/1.1319819

Cited by 16 publications

(16 citation statements)

References 9 publications

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“…In general, the RFEA measurements indicate how the IEDF can be controlled by driving a CCRF discharge with customized voltage waveforms, which is an important result for applications. 61,[88][89][90] By varying the phase the mean ion energy can be controlled. The mean value for the mean ion energy with two consecutive harmonics is 64 eV and can be varied by 35%, while the flux varies by 615 %.…”

Section: A Low Pressure (3 Pa)mentioning

confidence: 99%

Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms

Berger

Brandt

Franek

et al. 2015

Journal of Applied Physics

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Capacitively coupled radio frequency plasmas driven by customized voltage waveforms provide enhanced opportunities to control process-relevant energy distributions of different particle species. Here, we present an experimental investigation of the spatio-temporal electron heating dynamics probed by Phase-Resolved Optical Emission Spectroscopy (PROES) in an argon discharge driven by up to three consecutive harmonics of 13.56 MHz with individually adjustable harmonics' amplitudes and phases. PROES and voltage measurements are performed at fixed total voltage amplitudes as a function of the number of driving harmonics, their relative phases, and pressure to study the effects of changing the applied voltage waveform on the heating dynamics in collisionless and collisional regimes. Additionally, the ion energy distribution function (IEDF) is measured at low pressure. In this collisionless regime, the discharge is operated in the a-mode. The velocity of energetic electron beams generated by the expanding sheaths is found to be affected by the number of driving harmonics and their relative phases. This is understood based on the sheath dynamics obtained from a model that determines sheath voltage waveforms. The formation of the measured IEDFs is understood and found to be directly affected by the observed changes in the electron heating dynamics. It is demonstrated that the mean ion energy can be controlled by adjusting the harmonics' phases. In the collisional regime at higher pressures changing the number of harmonics and their phases at fixed voltage is found to induce heating mode transitions from the ato the c-mode. Finally, a method to use PROES as a non-invasive diagnostic to monitor and detect changes of the ion flux to the electrodes is developed. V C 2015 AIP Publishing LLC.

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Section: A Low Pressure (3 Pa)mentioning

confidence: 99%

Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms

Berger

Brandt

Franek

et al. 2015

Journal of Applied Physics

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“…Several authors have reported that the voltage amplitudes ðV n Þ of the n-th harmonic component at the electrode surface are influenced by the electrode reactance X n . 8,9) Kawata et al reported that the voltage amplitude observed at a high electrode impedance is higher than that observed at a low electrode impedance. 8) Berry et al reported that the maximum voltage amplitudes were obtained far from the highimpedance condition.…”

Section: Resultsmentioning

confidence: 98%

“…Extensive study has been carried out on the theoretical estimation and experimental observation of harmonic amplitude. [1][2][3][4][5][6][7][8][9][10][11] Harmonic amplitude is influenced not only by plasma parameters but also by the external circuit attached to the electrode. [6][7][8][9][10][11] It is commonly observed that a minor change in the circuit, such as changing the cable length, brings about large difference in the process result, owing to the change in the impedances of the external circuit at harmonic frequencies.…”

Section: Introductionmentioning

confidence: 99%

“…[1][2][3][4][5][6][7][8][9][10][11] Harmonic amplitude is influenced not only by plasma parameters but also by the external circuit attached to the electrode. [6][7][8][9][10][11] It is commonly observed that a minor change in the circuit, such as changing the cable length, brings about large difference in the process result, owing to the change in the impedances of the external circuit at harmonic frequencies. 6) Forster showed that the external circuit affects the second-harmonic amplitude through nonlinear equivalent circuit simulation.…”

Section: Introductionmentioning

confidence: 99%

“…8) On the other hand, Berry et al observed that the voltage amplitude of the harmonics at the electrode becomes high when moving the circuit attached to the electrode away from the high impedance condition for harmonic frequencies. 9) Rauf and Kushner found that the stray LC oscillators attached to the electrode can resonantly amplify some of the harmonics by investigating a plasma equipment model that consists of a linked reactor simulation and a circuit model. 10) Another nonlinear effect originating from the nonlinearity of the plasma sheath is the period doubling.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Control of the Harmonics Generation in a Capacitively Coupled Plasma Reactor

Yamazawa

Nakaya

Iwata

et al. 2007

jjap

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An analysis of the Kimura 3ST model of DNA sequence evolution is given on the basis of its continuous Lie symmetries. The rate matrix commutes with a U(1) × U(1) × U(1) phase subgroup of the group GL(4) of 4 × 4 invertible complex matrices acting on a linear space spanned by the four nucleic acid base letters. The diagonal 'branching operator' representing speciation is defined, and shown to intertwine the U(1)×U(1)×U(1) action. Using the intertwining property, a general formula for the probability density on the leaves of a binary tree under the Kimura model is derived, which is shown to be equivalent to established phylogenetic spectral transform methods.The use of Markov models of stochastic change to taxonomic character distributions is part of the standard armoury of techniques for describing mutations and inferring ancestral relationships between taxa. For the simplest models, symmetries of the rate matrix under discrete group actions (Z 2 for binary types, or Z 2 × Z 2 for DNA or RNA bases in molecular applications, for example) have been used to good effect in simplifying phylogenetic analysis (for references, see below). In particular, much attention has been centred on properties of the frequently used Kimura 3ST model [1] which possesses such symmetry.A general framework for phylogenetic branching models is as follows [2]. By assumption, different taxonomic units are identified, and classified by a set of defining characteristics: for example, based on morphological features or on sequence data, say, for a particular gene or protein. To each taxon is ascribed a character probability density, and it is the task of phylogenetic reconstruction to infer ancestral relationships amongst a group of related taxa, given sample character frequencies.In this letter, we describe an approach to the analysis of symmetries of such models using continuous transformation groups. Rather than identifying the character types with

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Mass-resolved retarding field energy analyzer and its measurement of ion energy distribution in helicon plasma

Jiang

Zhao

Liu

et al. 2005

Nuclear Instruments and Methods in Physics Research Section B:

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Control of the radio-frequency wave form at the chuck of an industrial oxide-etch reactor

Cited by 16 publications

References 9 publications

Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms

Experimental investigations of electron heating dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms

Control of the Harmonics Generation in a Capacitively Coupled Plasma Reactor

Mass-resolved retarding field energy analyzer and its measurement of ion energy distribution in helicon plasma

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