Amorphous organic semiconductive thin films with electric conductivities ranging between 10−5 and 101 Scm−1 are prepared on several temperature‐controlled substrates by excimer laser ablation (ELA) of 3, 4, 9, 10‐perylenetetracarboxylic dianhydride (PTCDA) with 193 nm (ArF), 248 nm (KrF) and 308 nm (XeCl) beams. The structure, electric conductivity, and carrier species of the prepared films depend strongly on the ablation wavelength, fluence, and substrate temperature. Thermoelectromotive force measurements demonstrate conversion of carrier species from n‐type to p‐type with increasing fluence of a 308‐nm beam from 0.2 to 4.0 Jcm−2pulse−1. A film prepared on a substrate at 300 °C by ELA with a 308‐nm beam partially contains a polyperinaphthalene (PPN) structure with electric conductivity of 10−2 to 10−1 Scm−1. © 1998 Scripta Technica, Electr Eng Jpn, 125(2): 19–26, 1998