Control of sonoluminescence signal in deionized water using carbon dioxide

Kumari, Sushma; Keswani, Manish; Singh, Satish Kumar; Beck, Mark; Liebscher, Eric; Deymier, Pierre A.; Raghavan, Srini

doi:10.1016/j.mee.2010.10.036

Cited by 31 publications

(34 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…was shown to be sufficient to completely kill the SL signal in the megasonic power density range of 0.1 to 4 W/cm 2 . 19 The results in Fig. 4 indicate that CO 2 containing DI water exhibits much lower SL intensities compared to air and Ar containing DI water, which is consistent with the previous work.…”

Section: Resultssupporting

confidence: 90%

“…Active bubble formation requires specific pulse-on time and the pulse-off time is typically chosen such that the bubble size falls below resonant size. 27 The total pulse time and percent duty cycle were chosen based on our earlier studies, 19 which showed that the PMT was sensitive to these values. The trends in SL signal are somewhat similar to those observed under continuous mode.…”

Section: Resultsmentioning

confidence: 99%

See 1 more Smart Citation

Analysis of Sonoluminescence Signal from Megasonic Irradiated Gas-Containing Aqueous Solutions Using Replaceable Single-Band Filters

Han

Keswani

Liebscher

et al. 2014

ECS J. Solid State Sci. Technol.

View full text Add to dashboard Cite

A simple method to resolve the features that are characteristic of hydroxyl radicals in sonoluminescence (SL) spectra from aqueous solutions has been developed. Using a modified version of cavitation threshold (CT) cell in which single band filters were sandwiched between the UV grade fused silica window and the photomultiplier tube (PMT) in the cell, photon emission in the wavelength range of 280 to 400 nm was measured. Four different single band filters, 280-305.5 nm, 300-340 nm, 335-375 nm and 374.5-397.5 nm were used. The results for air and Ar saturated DI water are consistent with those reported in the literature and obtained using expensive spectrometers. The SL signal collected in ammonium hydroxide solutions indicated that at higher power densities the signal intensity may not be relatable to the generation rate of hydroxyl radicals in their ground state.

show abstract

Section: Resultssupporting

confidence: 90%

Section: Resultsmentioning

confidence: 99%

Analysis of Sonoluminescence Signal from Megasonic Irradiated Gas-Containing Aqueous Solutions Using Replaceable Single-Band Filters

Han

Keswani

Liebscher

et al. 2014

ECS J. Solid State Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…Since CO 2 is highly soluble, a greater concentration is able to dissolve into the liquid, this causes in increase in diffusion into the bubble during expansion. Since the bubble collapse is very rapid the large amount of gas inside the bubble is unable to escape at the same rate, this precipitates a cushioning effect, reducing the heat obtained and disassociation inside the bubble [266]. Returning to the idea of a change in pH influencing adsorption of species at the surface, the reduction in coalescence of bubbles in CO 2 atmosphere has been suggested due to change in surface charge at the bubbles surface and steric mechanisms [209].…”

Section: Gas Saturation Effectmentioning

confidence: 99%

A parametric review of sonochemistry: Control and augmentation of sonochemical activity in aqueous solutions

Wood

Lee

Bussemaker

2017

Ultrasonics Sonochemistry

248

137

View full text Add to dashboard Cite

Please cite this article as: R.J. Wood, J. Lee, M.J. Bussemaker, A parametric review of sonochemistry: control and augmentation of sonochemical activity in aqueous solutions, Ultrasonics Sonochemistry (2017), doi: http:// dx.doi.org/10. 1016/j.ultsonch.2017.03.030 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain.A parametric review of sonochemistry: control and augmentation of sonochemical activity in aqueous solutions

show abstract

“…The authors of this paper have previously reported the strong ability of dissolved CO 2 to quench SL generation in DI water (3). It was shown that increasing amounts of dissolved CO 2 progressively decreased SL and ~150 ppm dissolved CO 2 was found to be Acknowledgments Authors affiliated with the University of Arizona gratefully acknowledge the financial support and loan of the single wafer spin tool by ProSys Inc and the donation of test structures by IMEC and FSI international.…”

mentioning

confidence: 89%

Effect of Dissolved CO₂ in De-Ionized Water in Reducing Wafer Damage During Megasonic Cleaning in MegPie

et al. 2011

View full text Add to dashboard Cite

Particle removal from wafer surfaces can be accomplished by irradiation of cleaning fluid by sound waves in the MHz frequency range. Unfortunately, unless proper cleaning conditions are chosen, megasonic irradiation may also result in damage to fragile wafer features. Here, we demonstrate a strong effect of dissolved CO 2 levels on the reduction of wafer damage during megasonic cleaning. Test structures with L/S patterns were irradiated with 0.93 MHz sound waves at varying power densities and dissolved CO 2 levels, in a single wafer spin cleaning tool, MegPie ® . Dissolution of increasing amounts of CO 2 in air saturated DI water caused a significant decrease in the number of breakages to line structures and also decreased the lengths of the line breakages, at all power densities up to 2.94 W/cm 2 . This ability of dissolved CO 2 to protect against feature damage correlates well with its ability to suppress sonoluminescence in sound irradiated DI water.

show abstract

Control of sonoluminescence signal in deionized water using carbon dioxide

Cited by 31 publications

References 27 publications

Analysis of Sonoluminescence Signal from Megasonic Irradiated Gas-Containing Aqueous Solutions Using Replaceable Single-Band Filters

Analysis of Sonoluminescence Signal from Megasonic Irradiated Gas-Containing Aqueous Solutions Using Replaceable Single-Band Filters

A parametric review of sonochemistry: Control and augmentation of sonochemical activity in aqueous solutions

Effect of Dissolved CO₂ in De-Ionized Water in Reducing Wafer Damage During Megasonic Cleaning in MegPie

Contact Info

Product

Resources

About

Control of sonoluminescence signal in deionized water using carbon dioxide

Cited by 31 publications

References 27 publications

Analysis of Sonoluminescence Signal from Megasonic Irradiated Gas-Containing Aqueous Solutions Using Replaceable Single-Band Filters

Analysis of Sonoluminescence Signal from Megasonic Irradiated Gas-Containing Aqueous Solutions Using Replaceable Single-Band Filters

A parametric review of sonochemistry: Control and augmentation of sonochemical activity in aqueous solutions

Effect of Dissolved CO2 in De-Ionized Water in Reducing Wafer Damage During Megasonic Cleaning in MegPie

Contact Info

Product

Resources

About

Effect of Dissolved CO₂ in De-Ionized Water in Reducing Wafer Damage During Megasonic Cleaning in MegPie