Control of piezoelectric ceramic actuator via dynamic fuzzy system model

Peng-zhi, 李朋志 Li; Chuan, 葛川 Ge; Zhide, 苏志德 Su; Feng, 闫丰 Yan; Yongxin, 隋永新 Sui; Huaijiang, 杨怀江 Yang

doi:10.3788/ope.20132102.0394

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Tip-enhanced Raman Spectroscopy (Ters) Is a Technique That C1

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2017

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“…At present, the scanning stage is mainly driven by piezoelectric ceramics, because the piezoelectric ceramic has small volume, large output power, high frequency response, no heat and other advantages [3]. So it is the ideal driving device of micro positioning system.…”

Section: Tip-enhanced Raman Spectroscopy (Ters) Is a Technique That Cmentioning

confidence: 99%

Design of Scanning Stage System for Tip-enhanced Raman Spectroscopy

Fan¹,

Que²,

Wang³

2017

dtetr

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Abstract. Nowadays most setups of Tip-enhanced Raman Spectroscopy use the commercial Scanning Probe Microscope that is not designed for TERS, which results in narrow operation space, small scanning scope, etc. In this paper, a scanning stage system for TERS is designed. The system is driven by piezoelectric ceramic and uses capacitive sensor as the feedback of displacement to compensate the hysteresis and creep effect of piezoelectric ceramics. This paper introduces the mechanical structure of the system and the principle of the signal processing circuit of the capacitive sensor. The mechanical structure is simulated and the capacitive sensor is calibrated. The experimental results indicated that the system can realize the scanning scope of 20μm, and the capacitance sensor has high precision and good repeatability.

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Section: Tip-enhanced Raman Spectroscopy (Ters) Is a Technique That Cmentioning

confidence: 99%