Control of Lateral Composition Distribution in Graded Films of Soluble Solid Systems A1−xBx by Partitioned Dual-Beam Pulsed Laser Deposition

Abstract

Lateral compositionally-graded thin films are powerful media for the observation of phase boundaries as well as for high-throughput materials exploration. We herein propose a method to prepare epitaxial lateral compositionally-graded films using a dual-beam pulsed laser deposition (PLD) method with two targets separated by a partition. Tuning the ambient pressure and the partition—substrate gap makes it possible to control of the gradient length of the deposits at the small sizes (≤ 10 mm) suitable for commercial oxide single crystal substrates. A simple Monte Carlo simulation qualitatively reproduced the characteristic features of the lateral thickness distribution. To demonstrate this method, we prepared (1−x)PbTiO3—xPbZrO3 and (1−x)LaMnO3—xLa0.6Sr0.4MnO3 films with lateral composition gradient widths of 10 and 1 mm, respectively, with the partitioned dual PLD.

Pulsed Laser Deposition of Epitaxial Non-Doped PbTiO3 Thin Films from PbO–TiO2 Mosaic Targets

“…Both AFM and PFM were carried out using a scanning probe microscopy system (MFP-3D Classic, Asylum Research, Santa Barbara, CA, USA). See [20] for the detail of XRD, XPS, and PFM procedures.…”

“…In this way, Maruyama et al have succeeded in obtaining epitaxial LiCoO 2 thin films by alternative laser ablation of Li 2 CO 3 and CoO targets [18]. A similar approach by using the simultaneous ablation of two targets (with two independent lasers or a split laser beam) can also be a powerful tool for this purpose, in this case avoiding continuous target exchange [19,20]. In this manner, Hussey and Gupta have prepared good quality YBa 2 Cu 3 O 7−d (YBCO) films by simultaneously shedding laser beams to individual YBa 2 O x and CuO targets [21].…”

Ионно-Плазменное Осаждение Многокомпонентных Пленок С Заданным Законом Распределения Состава По Толщине

“…Свойства многокомпонентных сегнетоэлектрических материалов (пленки, керамики) сильно зависят от элементного соотношения двухвалентных атомов Ba и Sr, занимающих кубооктаэдрические позиции в перовскитной решетке. Изменяя соотношение между компонентами, можно менять структуру и электрические характеристики материалов, что может быть востребовано для различных прикладных задач [1][2][3][4][5][6][7][8][9]. В настоящее время при создании методом ионно-плазменного осаждения структуры с изменяющимся по толщине пленки составом (graded film) необходима смена мишеней, что приводит к формированию " ступеней" состава пленки и нежелательным дефектам межфазных границ.…”