Control and in-situ imaging of heat & gas mediated processes in FIB/SEM system

Formation of Tungsten Oxide Nanowires by Electron-Beam-Enhanced Oxidation of WS2 Nanotubes and Platelets

“…Real-time observations in an SEM were done utilizing a μ-Reactor connected to a common SEM stage and equipped with an onchip heater. 37 Gas was injected into a differentially pumped reaction space (2 μL volume) above the heating element. The observation of the process by an electron beam is possible via a pressure-limiting aperture.…”

Microreactor for Clean and Controlled In-situ SEM Imaging of CVD Processes

“…To demonstrate the well-controlled conditions within the reactor, we run a graphene monolayer growth process, which is known to require a very clean metal substrate [1]. Polycrystalline platinum foil (25 microns thick) was used as the sample from which a small chunk of 50 by 50 micrometers in size was prepared by FIB, transferred on a micromanipulator needle (EasyLift) and glued to the heating plate inside the µReactor [2] by tungsten deposition. The reaction volume was closed by a retractable lid, which assures gas delivery and sealing.…”

“…Thermo Fisher Scientific, Brno, Jihomoravsky kraj, Czech Republic,2 Thermo Fisher Scientific, Eindhoven, Noord-Brabant, Netherlands…”