Contrast Test of KOH Solutions Jet-Assisted Laser Etching on Al₂O₃ Ceramics

Abstract

An experimental device of KOH solutions jet-assisted laser etching is designed, Laser-chemical combined etching technology is combined with the Medium-jet erosion processing ,and the influence on the etching capacity and cross section quality of material sample of laser processing parameters,jet processing parameters are studied. The results show that the laser processing parameters and jet processing have a decisive impact on the quality of the workpiece, the composite processing technology can remove most of melting slag which are produced by the laser processing, the surface roughness are effectively reduced. The blind holes of the machined materials have the regular shape.