Continuum modeling of radio-frequency glow discharges. I. Theory and results for electropositive and electronegative gases

Gogolides, Εvangelos; Sawin, Herbert H.

doi:10.1063/1.352250

Cited by 203 publications

(136 citation statements)

References 42 publications

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“…Similar to the treatment in low-pressure glow discharges [12], the energy of emitted electron is fixed to 0.5 eV. For ions and metastables, it is assumed that their fluxes on the electrodes are dominated by drift fluxes, driven by the electric field, and that their diffusive fluxes are negligible.…”

Section: Computational Modelmentioning

confidence: 99%

“…This model has been experimentally validated [10], [11], and is similar to fluid models developed for low-pressure glow discharges [12] and for atmospheric pressure glow discharges [13]. Discharge characteristics are computationally studied in the direction perpendicular to the electrode plane by solving the governing equations for each species in the plasma, Poisson equation for the electric field across the discharge gap, and the electron energy conservation equation for the electron temperature.…”

Section: Computational Modelmentioning

confidence: 99%

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Mode Characteristics of radio-frequency atmospheric glow discharges

Shi

Kong

2005

IEEE Trans. Plasma Sci.

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Section: Computational Modelmentioning

confidence: 99%

Section: Computational Modelmentioning

confidence: 99%

Mode Characteristics of radio-frequency atmospheric glow discharges

Shi

Kong

2005

IEEE Trans. Plasma Sci.

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“…The resulting equations are continuity equations for density, momentum, kinetic energy, etc. [52,53,54].…”

Section: Derivation From the Boltzmann Equationmentioning

confidence: 99%

“…Therefore the series of momentum equations has to be truncated in a convenient way, and one needs to introduce an assumption in the highest moment equation to be included. If we truncate after the first moment and simplify further [54] in the momentum equation, we retain:…”

Section: Derivation From the Boltzmann Equationmentioning

confidence: 99%

Deviations from the local field approximation in negative streamer heads

Brok

Ebert

et al. 2007

Journal of Applied Physics

170

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C e n t r u m v o o r W i s k u n d e e n I n f o r m a t i c a Modelling, Analysis and Simulation Modelling, Analysis and SimulationDeviations from the local field approximation in negative streamer heads C. Li, W.J.M. Brok, U. Ebert, J.J.A.M. van der Mullen Deviations from the local field approximation in negative streamer heads ABSTRACT Negative streamer ionization fronts in nitrogen under normal conditions are investigated both in a particle model and in a fluid model in local field approximation. The parameter functions for the fluid model are derived from swarm experiments in the particle model. The front structure on the inner scale is investigated in a 1D setting, allowing reasonable run-time and memory consumption and high numerical accuracy without introducing super-particles. If the reduced electric field immediately before the front is <= 50kV/(cm bar), solutions of fluid and particle model agree very well. If the field increases up to 200kV/(cm bar), the solutions of particle and fluid model deviate, in particular, the ionization level behind the front becomes up to 60% higher in the particle model while the velocity is rather insensitive. Particle and fluid model deviate because electrons with high energies do not yet fully run away from the front, but are somewhat ahead. This leads to increasing ionization rates in the particle model at the very tip of the front. The energy overshoot of electrons in the leading edge of the front actually agrees quantitatively with the energy overshoot in the leading edge of an electron swarm or avalanche in the same electric field. REPORT MAS-E0706 FEBRUARY 2007 Mathematics Subject Classification: 82D10Keywords and Phrases: streamers; ionization front; particle model; local field approximation Note: This work was carried out under project "Multiscale Modelling and Nonlinear Dynamics"-"Electric discharges and plasma technology". The authors acknowledge support by the Dutch national program Bsik, in the ICT project BRICKS, theme MSV1. arXiv:physics/0702129v1 15 Feb 2007Deviations from the local field approximation in negative streamer heads Negative streamer ionization fronts in nitrogen under normal conditions are investigated both in a particle model and in a fluid model in local field approximation. The parameter functions for the fluid model are derived from swarm experiments in the particle model. The front structure on the inner scale is investigated in a 1D setting, allowing reasonable run-time and memory consumption and high numerical accuracy without introducing super-particles. If the reduced electric field immediately before the front is ≤ 50 kV/(cm bar), solutions of fluid and particle model agree very well. If the field increases up to 200 kV/(cm bar), the solutions of particle and fluid model deviate, in particular, the ionization level behind the front becomes up to 60 % higher in the particle model while the velocity is rather insensitive. Particle and fluid model deviate because electrons with high energies do not yet fully run away from the front, ...

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“…Negative ion etching with low energies and low charging potentials is also attractive for low damage processing required in node technologies below 50 nm [30]. So far, despite of good theoretical coverage [31][32][33][34][35] and a large variety of methods for negative ion diagnostic including optical emission [36], photodetachment [37], Langmuir probe [38][39][40][41][42][43], thermal probe [44], propagation of the ion acoustic waves [45][46][47] and Thomson scattering [48] there are still important basic questions related to highly electronegative discharges that need to be answered.…”

Section: Introductionmentioning

confidence: 99%

Properties of highly electronegative plasmas produced in a multipolar magnetic-confined device with a transversal magnetic filter

Draghici¹,

Stamate²

2010

J. Phys. D: Appl. Phys.

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Highly electronegative plasmas were produced in Ar/SF 6 gas mixtures in a DC discharge with multipolar magnetic confinement and transversal magnetic filter.Langmuir probe and mass spectroscopy were used for plasma diagnostics. Plasma potential drift, the influence of small or large area biased electrodes on plasma parameters, the formation of the negative ion sheath, and etching rates by positive and negative ions have been investigated for different experimental conditions.Reducing the electron temperature below 1 eV the density ratio of negative ion to electron exceeded 100 even for very low amounts of SF 6 gas. The plasma potential drift could be controlled by proper wall conditioning. A large-electrode biased positively had no effect on plasma potential for density ratios of negative ion to electrons larger than 50. For similar electronegativities or higher a negative ion sheath could be formed by applying a positive bias of a few hundred volts.

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Continuum modeling of radio-frequency glow discharges. I. Theory and results for electropositive and electronegative gases

Cited by 203 publications

References 42 publications

Mode Characteristics of radio-frequency atmospheric glow discharges

Mode Characteristics of radio-frequency atmospheric glow discharges

Deviations from the local field approximation in negative streamer heads

Properties of highly electronegative plasmas produced in a multipolar magnetic-confined device with a transversal magnetic filter

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