Abstract:A MEMS-based micro valve fitted with a piezoelectric actuator is presented in order to achieve a continuously adjustable flow rate control. The micro valve is realized using a cost-effective fabrication scheme with simple polyimide (PI) bonding, which has an average shear strength of up to 39.8 MPa, indicating a relatively high reliability. The simulation results based on the finite element method (FEM) show that the valve membrane is able to seal the inlet and cut off the flow successfully with a piezoelectri… Show more
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