Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns

Sk, Ahn; Cha, Joowon; Myung, Ho; Kim, Seok-Min; Kang, Shinill

doi:10.1063/1.2392960

Cited by 104 publications

(80 citation statements)

References 12 publications

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“…7 (III)) and two substrates (flexible substrate and rigid substrate, Fig. 7 (I)) can be used for the RNIL (Lan et al, 2008, Ahn et al, 2006, Ahn & Guo, 2008, Youn et al, 2008, Kao et al, 2005, Chang et al, 2006. Lan et al, have presented a general literature review on the RNIL (Lan et al, 2008).…”

Section: Roll Imprint Processmentioning

confidence: 99%

Nanoimprint Lithography

강신일¹

2016

Encyclopedia of Nanotechnology

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Section: Roll Imprint Processmentioning

confidence: 99%

Nanoimprint Lithography

강신일¹

2016

Encyclopedia of Nanotechnology

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“…One is directly fabricating the micro/nano feature on the cylinder surface, using ultra-precision machining or other manufacturing method. [19] The other is to cover a shim stamper around the cylinder surface, in which the shim stamper is fabricated previously using electron beam lithography or other lithography technologies. [20] …”

Section: Fig 4 Schematic Diagrams Of the Uv-type Rnil System For Rimentioning

confidence: 99%

Development of the Roll Type Incremental Micro Pattern Imprint System for Large Area Pattern Replication

Song

Lee

Lan

et al. 2010

Precision Assembly Technologies and Systems

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Abstract. Flexible display has been attracting attention in the research field of next generation display in recent years. And polymer is a candidate material for flexible displays as it takes advantages including transparency, light weight, flexibility and so on. Rolling process is suitable and competitive process for the high throughput of flexible substrate such as polymer. In this paper, we developed a prototype of roll-to-flat (R2F) thermal imprint system for large area micro pattern replication process, which is one the key process in the fabrication of flexible displays. Tests were conducted to evaluate the system feasibility and process parameters effect, such as flat mold temperature, loading pressure and rolling speed. 100 mm × 100 mm stainless steel flat mold and commercially available polycarbonate sheets were used for tests and results showed that the developed R2F system is suitable for fabrication of various micro devices with micro pattern replication on large area.

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“…8 Ahn et al (2006) fabricated a continuous ultraviolet roll nanoimprint lithography system which achieved thickness uniformity while replicating large-scale nano-and micro-sized patterns. 9 The other is a thermal imprint lithography method which thermal imprint lithography uses the glass transition temperature to improve replication efficiency, because the Young's modulus of the polymer dramatically decreases near the glass transition region. Due to this merit, thermal imprint lithography has been widely applied to the fabrication of large area R2R or roll-to-plate (R2P) processes, which produce a high throughput in a continuous process with uniform quality.…”

Section: Introductionmentioning

confidence: 99%

Suppression of thermal crown of heating roll for large area thermal imprint with consideration of thermal resistance between roll and shaft

Moon

Kim

Lee

2015

Int. J. of Precis. Eng. and Manuf.-Green Tech.

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Printed electronic circuits are becoming increasingly employed in flexible electronics such as radiofrequency (RF) antenna modules and organic solar cells. To achieve a high-efficiency module, very thin and small electrodes need to be produced with high throughput. This work reports on a heating roll design for the roll-to-roll (R2R) thermal imprinting process. Due to non-uniform thermal deformation of the roll, it is difficult to produce uniform electrodes throughout the large surface. This investigation focused on a thermo-mechanical design for the heating roll that improves the uniformity of its temperature and thermal deformation. This paper presents the design procedure and fabrication process of the R2R thermal imprinting. Applying this method for optimizing the heating roll will contribute to large area imprinting and high uniformity.

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Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns

Cited by 104 publications

References 12 publications

Nanoimprint Lithography

Nanoimprint Lithography

Development of the Roll Type Incremental Micro Pattern Imprint System for Large Area Pattern Replication

Suppression of thermal crown of heating roll for large area thermal imprint with consideration of thermal resistance between roll and shaft

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