2012
DOI: 10.1063/1.4767995
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Continuous and scalable fabrication of flexible metamaterial films via roll-to-roll nanoimprint process for broadband plasmonic infrared filters

Abstract: We demonstrate the continuous fabrication of large-area flexible metamaterial films via roll-to-roll (R2R) nanoimprint lithography (NIL) technique that can be conducted in an ambient environment at high speed. The plasmonic metal-insulator-metal structure is successfully fabricated by R2R NIL to continuously pattern the sub-wavelength scale metal disk array on flexible substrates. The patterned metal disks having varying diameters and sub-micron spacing with few defects lead to the desired broadband IR filteri… Show more

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Cited by 95 publications
(58 citation statements)
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“…Among plenty of SPR-based devices, metamaterial metalinsulator-conductor (MIC) devices with many distinguished configurations through various resonant mechanisms, including SPRs, localized SPRs (LSPRs), and Fabry-Perot resonance with different application of sensing/solar cell, have been reported in the past decade [7,9,[12][13][14][15][16][17][18][19][20][21][22]. In the report published by Hao et al [23], the metamaterial MIC structure with metallic nanoring pattern of Ag (100 nm) as the top layer, SiO 2 as a spacer (60 nm), and a homogenous layer of Ag (100 nm) as a back reflector has been evaluated experimentally and found it as a great absorber with an average absorbance of 71 % over the entire visible spectrum, when the incident angle propagated in the normal direction to the metasurface [23].…”
Section: Introductionmentioning
confidence: 99%
“…Among plenty of SPR-based devices, metamaterial metalinsulator-conductor (MIC) devices with many distinguished configurations through various resonant mechanisms, including SPRs, localized SPRs (LSPRs), and Fabry-Perot resonance with different application of sensing/solar cell, have been reported in the past decade [7,9,[12][13][14][15][16][17][18][19][20][21][22]. In the report published by Hao et al [23], the metamaterial MIC structure with metallic nanoring pattern of Ag (100 nm) as the top layer, SiO 2 as a spacer (60 nm), and a homogenous layer of Ag (100 nm) as a back reflector has been evaluated experimentally and found it as a great absorber with an average absorbance of 71 % over the entire visible spectrum, when the incident angle propagated in the normal direction to the metasurface [23].…”
Section: Introductionmentioning
confidence: 99%
“…2 In particular, plasmonic resonators such as ribbons of metal-insulator-metal (MIM) multilayers are known to exhibit angularly independent, spectrally tunable, nearly total absorption in strong subwavelength volumes for transverse-magnetic polarized light. [3][4][5][6][7][8][9][10] Moreover, the absorption spectrum α(λ) can be shaped by combining several MIM ribbons of different dimensions within the same subwavelength period. [11][12][13] According to Kirchhoff's second law, an absorbing structure behaves like a grey body with an emissivity (λ) = α(λ) that is expected to display ondemand spectral, spatial and light polarization properties.…”
Section: Introductionmentioning
confidence: 99%
“…The need for large area, light weight organic solar cells has increased significantly due to cost analysis for installation of the cells under realistic conditions, for instance in houses. [84][85][86][87] Several examples of the use of RTR processed organic solar cells have been reported with efficiencies close to those made by spin-coating based on P3HT:PCBM bulk heterojunction photoactive materials. 88 Smallscale organic solar cells prepared in a glove box filled with nitrogen with thermally evaporated electrodes have higher efficiency owing to the film uniformity and reduced defect density.…”
Section: Roll-to-roll Printing (Rtr)mentioning
confidence: 99%
“…14,84,87 One can view gravure printing as a positive method of printing while flexographic printing can be viewed as a negative method of printing as shown in Figure 13. 14 The advantage of flexographic printing is that the line width of the final printed pattern can be smaller than that printed by gravure printing (as low as hundreds of nanometers).…”
Section: 100mentioning
confidence: 99%