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Cited by 8 publications
(3 citation statements)
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“…[13][14][15][16] Despite this variety of potential applications, a major impediment to the evolution of these devices into mainstream technological impact use has been the limited material options that restrict both the nature of structures that can be realized and their applications. Currently, the majority of these devices are manufactured from materials used in the semiconductor industry, such as metals, [17] semiconductors, [18][19][20] and glasses. [21,22] These materials were selected due to their electronic compatibility and mature processing; however, they are generally difficult to chemically functionalize for biological and chemical sensitivity, and also generally require organic solvents or thermal processing for device manufacture.…”
Section: Introductionmentioning
confidence: 99%
“…[13][14][15][16] Despite this variety of potential applications, a major impediment to the evolution of these devices into mainstream technological impact use has been the limited material options that restrict both the nature of structures that can be realized and their applications. Currently, the majority of these devices are manufactured from materials used in the semiconductor industry, such as metals, [17] semiconductors, [18][19][20] and glasses. [21,22] These materials were selected due to their electronic compatibility and mature processing; however, they are generally difficult to chemically functionalize for biological and chemical sensitivity, and also generally require organic solvents or thermal processing for device manufacture.…”
Section: Introductionmentioning
confidence: 99%
“…Many of the microvalves reported to date utilize the actuation of a flexible diaphragm to control flow. This actuation has been performed electrostatically [15], piezoelectrically [16], or thermopneumatically [17]. A microvalve targeting μGC integration has been reported [18].…”
Section: Introductionmentioning
confidence: 99%
“…In particular, sensitive and miniaturized flow sensor are beginning to be integrated in microreactors (Shin and Besser 2006;De Mas et al 2005), a new breed of silicon based devices devoted to handle small amount of reagents with strict temperature and pressure conditions. Miniaturized devices for multiple gas flow handling are being proposed also for the semiconductor industry (Henning et al 1998).…”
Section: Introductionmentioning
confidence: 99%