2020
DOI: 10.1109/jphotov.2019.2949430
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Contact Resistivity of the p-Type Amorphous Silicon Hole Contact in Silicon Heterojunction Solar Cells

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Cited by 37 publications
(15 citation statements)
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“…The minimum c of 104 m.cm 2 is obtained with the thinnest VOx (4.5 nm), comparable to that of the best reported a-Si:H/a-Si:H(p) contact ( 100 m.cm 2 ) in conventional SHJ device. [44] Note that the c extracted here should be considered as the upper limit value for the VOx/p-Si and VOx/a-Si:H/p-Si heterocontacts, because it consists of the resistance of the front VOx/p-Si and rear p-Si/Al interfaces, as well as the bulk resistivity of VOx and a-Si:H. Therefore, these c values should meet the threshold ( 100 m.cm 2 ) for a full-area contact required to make high efficiency c-Si solar cells. [45] Figure 4b shows the dependence of the c of the VOx/p-Si heterocontacts on temperature, which was measured on a probe station with an integrated heating system.…”
Section: Resultsmentioning
confidence: 99%
“…The minimum c of 104 m.cm 2 is obtained with the thinnest VOx (4.5 nm), comparable to that of the best reported a-Si:H/a-Si:H(p) contact ( 100 m.cm 2 ) in conventional SHJ device. [44] Note that the c extracted here should be considered as the upper limit value for the VOx/p-Si and VOx/a-Si:H/p-Si heterocontacts, because it consists of the resistance of the front VOx/p-Si and rear p-Si/Al interfaces, as well as the bulk resistivity of VOx and a-Si:H. Therefore, these c values should meet the threshold ( 100 m.cm 2 ) for a full-area contact required to make high efficiency c-Si solar cells. [45] Figure 4b shows the dependence of the c of the VOx/p-Si heterocontacts on temperature, which was measured on a probe station with an integrated heating system.…”
Section: Resultsmentioning
confidence: 99%
“…However, significant engineering advances in electronic properties to lower the VB edge energy farther from vacuum (increase E VB ), while maintaining high doping and low D it , could push the performance higher into the blue region. This compares with (p) a-Si:H (gray dotted circles) doped to approximately 10 19 cm −3 [44] with a combined doping and alignment leading to high electronic performance and efficiencies of 25.4%, regardless of D it . Since (p) a-Si:H has ideal N A and E VB , these contacts have a higher D it tolerance than NiO x .…”
Section: A Simulated Sensitivity Of Materials Parametersmentioning
confidence: 92%
“…A low ρ c at the TCO/a-Si:H and a-Si:H/c-Si heterojunctions can be reached by sufficient a-Si:H net doping [3], [9], [22]. The net doping of amorphous silicon is defined by the dopant concentration and the doping efficiency, which is reduced by defect creation [23]- [25].…”
Section: B A-si:h Doping Variationmentioning
confidence: 99%
“…However, electrical and optical properties are closely linked. A high carrier concentration, e.g., leads to a higher lateral conductivity [6] and a lower contact resistivity [9], [10] while reducing the transparency. Thus, high transparency has to be balanced with high conductivity, e.g., via tuning the TCO oxygen (O 2 ) content [11].…”
mentioning
confidence: 99%
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