2016 IEEE 66th Electronic Components and Technology Conference (ECTC) 2016
DOI: 10.1109/ectc.2016.328
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Contact Pressure and Load Measurement Techniques for Applications in Semiconductor Packaging

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Cited by 2 publications
(2 citation statements)
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“…Thermal interface material BLT profile on the die surface depends on the load and pressure as driven by thermomechanical interaction between the package and the thermal solution. For this purpose, a thin film pressure sensor metrology [18] is used to perform in situ measurements of pressure distribution on the die. Figure 7 illustrates the sensitivity of the thermal solution attach performance, quantified as the junction-to-heat pipe thermal resistance [1][2][3][4]…”
Section: In Situ Measurement Of Thermal Solution Attachmentioning
confidence: 99%
See 1 more Smart Citation
“…Thermal interface material BLT profile on the die surface depends on the load and pressure as driven by thermomechanical interaction between the package and the thermal solution. For this purpose, a thin film pressure sensor metrology [18] is used to perform in situ measurements of pressure distribution on the die. Figure 7 illustrates the sensitivity of the thermal solution attach performance, quantified as the junction-to-heat pipe thermal resistance [1][2][3][4]…”
Section: In Situ Measurement Of Thermal Solution Attachmentioning
confidence: 99%
“…This is critical for an accurate prediction of the achieved spatial pressure profile across the TIM. Model results for several spring displacement values, which are controlled by altering the height of the back plate swage nuts, are compared with the experimental data acquired using a thin-film piezo-resistive pressure sensor metrology [18], as shown in Fig. 10.…”
Section: Structural Modelingmentioning
confidence: 99%