A new experimental technique based on network analyzer was developed for characterizing the full inductance matrices (both self and mutual inductance) of packagdinterconnect structures. This frequency-domain based measurement technique, including its formulation and procedure, is discussed in this paper. A total of four packages, an 12OQFP, a 400TAB, a 313PBGA, and an Alloy 42 132CQFP were selected for the self/mutual L characterization. The measurement results are compared to those obtained by using a time domain reflectometer (TDR)-based technique as well as with the modeling data calculated by 3-D EM tools.Index Terms-Self inductance, mutual inductance, lumpedelement model, S parameters, 2 parameters.