2015
DOI: 10.1111/jace.13518
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Confirmation of the Dominant Defect Mechanism in Amorphous In–Zn–O Through the Application of In Situ Brouwer Analysis

Abstract: The dominant point defect mechanism of amorphous (a‐) indium zinc oxide (IZO) was probed through in situ electrical characterization of sputtered a‐IZO thin films in response to changes in oxygen partial pressure (pO2) at 300∘C. The results yielded a power law dependence of conductivity (σ) versus pO2 of ∼−1/6. This experimental method, known as Brouwer analysis, confirms doubly‐charged oxygen vacancies as the dominant defect species in a‐IZO. The success of this study suggests that Brouwer analysis is a viabl… Show more

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Cited by 8 publications
(13 citation statements)
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“…The maximum mobility trend of MO:x wt% PEI composites reflect the characteristics of the starting MO matrices, and thus it is expected that IGO should underperform the other MOs because of the strong affinity of Ga for oxygen. 52,53 However, note also that a mobility for IGO (In:Ga = 70:30, 300 °C) as high as ∼4.9 cm 2 /(V•s) is unprecedented. 51,54 Furthermore, while the V T values of In 2 O 3 :x wt% PEI monotonically increase (positive shift) with the PEI concentration (−14.6 ± 1.1 V for 0.0 wt% PEI, −3.9 ± 2.1 V for 1.0 wt% PEI, 12.3 ± 0.8 V for 6.0 wt% PEI), for all of other MO:x wt% PEI devices, V T first decreases (Figure 1d) from +12.5 ± 2.3 V (neat IZO), + 48.6 ± 7.9 V (neat IGO), and +11.3 ± 1.1 V (neat IGZO), to +5.8 ± 1.6 V (0.5 wt% PEIdoped IZO), + 18.7 ± 1.1 V (1.0 wt% PEI-doped IGO), and +8.5 ± 1.2 V (0.5 wt% PEI-doped IGZO), respectively, and then increases to much larger values of +44.0 ± 5.4 V (6.0 wt% PEI-doped IZO), + 28.2 ± 6.1 V (6.0 wt% PEI-doped IGO), and +24.0 ± 5.5 V (6.0 wt% PEI-doped IGZO), respectively.…”
Section: ■ Experimental Sectionmentioning
confidence: 99%
“…The maximum mobility trend of MO:x wt% PEI composites reflect the characteristics of the starting MO matrices, and thus it is expected that IGO should underperform the other MOs because of the strong affinity of Ga for oxygen. 52,53 However, note also that a mobility for IGO (In:Ga = 70:30, 300 °C) as high as ∼4.9 cm 2 /(V•s) is unprecedented. 51,54 Furthermore, while the V T values of In 2 O 3 :x wt% PEI monotonically increase (positive shift) with the PEI concentration (−14.6 ± 1.1 V for 0.0 wt% PEI, −3.9 ± 2.1 V for 1.0 wt% PEI, 12.3 ± 0.8 V for 6.0 wt% PEI), for all of other MO:x wt% PEI devices, V T first decreases (Figure 1d) from +12.5 ± 2.3 V (neat IZO), + 48.6 ± 7.9 V (neat IGO), and +11.3 ± 1.1 V (neat IGZO), to +5.8 ± 1.6 V (0.5 wt% PEIdoped IZO), + 18.7 ± 1.1 V (1.0 wt% PEI-doped IGO), and +8.5 ± 1.2 V (0.5 wt% PEI-doped IGZO), respectively, and then increases to much larger values of +44.0 ± 5.4 V (6.0 wt% PEI-doped IZO), + 28.2 ± 6.1 V (6.0 wt% PEI-doped IGO), and +24.0 ± 5.5 V (6.0 wt% PEI-doped IGZO), respectively.…”
Section: ■ Experimental Sectionmentioning
confidence: 99%
“…For instance, the measurement of the electrical conductivity as a function of oxygen partial pressure (i.e., Brower analysis) is expected to follow the behavior of the majority charge carrier (electrons or holes), which can then be used to fit a proper defect chemistry model to obtain the equilibrium constants. [20,21] The major drawback of the Brower conductivity method is that the charge carrier mobility may also vary with the oxygen partial pressure, giving rise to a nontrivial interdependence difficult to untangle. Another common method for getting insights into the oxygen nonstoichiometry of thin films is measuring the lattice parameters by X-ray diffraction (XRD), since a unit-cell expansion is commonly observed in oxygen deficient oxides.…”
Section: Introductionmentioning
confidence: 99%
“…Becker implemented an in situ optical absorption relaxation approach similar to that to T. Beiger et al. 181 and surface exchange coefficients 5,48,50,64,66 over a wide range of temperatures and oxygen partial pressures. They also noted a discrepancy of the surface exchange coefficient, k chem ,…”
Section: Development Of In Situ Optical Absorbance Techniquementioning
confidence: 99%