Conducting Polymers as EAPs: Microfabrication

Jager, Edwin; Maziz, Ali; Khaldi, Alexandre

doi:10.1007/978-3-319-31530-0_13

Cited by 1 publication

(2 citation statements)

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“…This was possible because the continuous CP layer on top of the SPE protected the SPE from swelling caused by the photoresist processing. However, if the top CP layer, that is, the layer on top of the SPE, is already patterned, as is the case for our VPP-patterned CP electrodes, photoresist cannot be used because parts of the SPE are exposed to the solutions used in the photoresist process, causing swelling . Here, we used laser ablation to define the final device shape.…”

Section: Resultsmentioning

confidence: 99%

“…However, if the top CP layer, that is, the layer on top of the SPE, is already patterned, as is the case for our VPP-patterned CP electrodes, photoresist cannot be used because parts of the SPE are exposed to the solutions used in the photoresist process, causing swelling. 40 Here, we used laser ablation to define the final device shape. Laser ablation has a lower resolution than photolithography combined with RIE but is more versatile in rapid prototyping applications.…”

Section: Laser Ablationmentioning

confidence: 99%

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Patterning Highly Conducting Conjugated Polymer Electrodes for Soft and Flexible Microelectrochemical Devices

Khaldi

Falk

Bengtsson

et al. 2018

ACS Appl. Mater. Interfaces

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There is a need for soft actuators in various biomedical applications to manipulate delicate objects such as cells and tissues. Soft actuators are able to adapt to any shape and limit the stress applied to delicate objects. Conjugated polymer (CP) actuators, especially in the so-called trilayer configuration, are interesting candidates for driving such micromanipulators. However, challenges involved in patterning the electrodes in a trilayer with individual contact have prevented further development of soft micromanipulators based on CP actuators. To allow such patterning, two printing-based patterning techniques have been developed. First, an oxidant layer is printed using either syringe-based printing or microcontact printing, followed by vapor-phase polymerization of the CP. Submillimeter patterns with electronic conductivities of 800 S·cm are obtained. Next, laser ablation is used to cleanly cut the final device structures including the printed patterns, resulting in fingers with individually controllable digits and miniaturized hands. The methods presented in this paper will enable integration of patterned electrically active CP layers in many types of complex three-dimensional structures.

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Section: Resultsmentioning

confidence: 99%

Section: Laser Ablationmentioning

confidence: 99%