2011
DOI: 10.1063/1.3581893
|View full text |Cite
|
Sign up to set email alerts
|

Conducting interpenetrating polymer network sized to fabricate microactuators

Abstract: Interpenetrating polymer networks can become successful actuators in the field of microsystems providing they are compatible with microtechnologies. In this letter, we report on a material synthesized from poly͑3,4-ethylenedioxythiophene͒ and polytetrahydrofuran/poly͑ethylene oxide͒ and microsized by decreasing its thickness to 12 m and patterning the lateral side using plasma etching at high etch rates and with vertical sidewalls. A chemical process and a "self degradation" are proposed to explain such etchin… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
73
0

Year Published

2013
2013
2019
2019

Publication Types

Select...
9
1

Relationship

4
6

Authors

Journals

citations
Cited by 63 publications
(73 citation statements)
references
References 15 publications
0
73
0
Order By: Relevance
“…1,2 CP actuators have been demonstrated comprising many different conducting polymers (polyaniline, polypyrrole, poly (3,4-ethylenedioxythiophene)) and dopants. [3][4][5][6] They have been fabricated in a variety of sizes, 7 from nano-and microscale 8,9 to centimeters scale 1,2 and in different configurations offering different kind of movements such as fibers or films producing linear movements, [10][11][12] bilayers and trilayers producing angular movements, 1,2,13 and as bulk material producing perpendicular expansion. [14][15][16] Polypyrrole (PPy) doped with dodecylbenzenesulfonate (DBS) is one of the most studied materials for actuators due to its good mechanical properties and the great volume changes occurring when the electrochemical reaction (1) occurs: 8 …”
Section: Introductionmentioning
confidence: 99%
“…1,2 CP actuators have been demonstrated comprising many different conducting polymers (polyaniline, polypyrrole, poly (3,4-ethylenedioxythiophene)) and dopants. [3][4][5][6] They have been fabricated in a variety of sizes, 7 from nano-and microscale 8,9 to centimeters scale 1,2 and in different configurations offering different kind of movements such as fibers or films producing linear movements, [10][11][12] bilayers and trilayers producing angular movements, 1,2,13 and as bulk material producing perpendicular expansion. [14][15][16] Polypyrrole (PPy) doped with dodecylbenzenesulfonate (DBS) is one of the most studied materials for actuators due to its good mechanical properties and the great volume changes occurring when the electrochemical reaction (1) occurs: 8 …”
Section: Introductionmentioning
confidence: 99%
“…PPy has not only been used as the active material in large actuators [40], but also been micro-fabricated [41][42][43][44][45], amongst others, to drive a microrobotic arm [46]. Being a polymer, PPy is intrinsically light-weight (about 1.5 g/cm 3 [47]), thus easing the task of achieving quasi-neutral buoyancy of the whole microrobot.…”
Section: Selection Of Active Materialsmentioning
confidence: 99%
“…When a voltage is applied between the two faces of the device, one conjugated polymer layer is oxidized and the other is reduced, inducing opposite volume change created by ions of the two active layers causing the bending of the material ( Figure 1). Recently, these conjugated polymer trilayer actuators have been microfabricated using different techniques such as laser ablation [14] or photolithography combined with reactive ion etching [15]. These early microfabricated trilayer CP actuators employed relatively thick membranes, which limited the achieved deflection.…”
Section: Soft Actuatorsmentioning
confidence: 99%