Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation

Vygranenko, Yuri; Fernandes, M.; Vieira, M.; Lavareda, G.; Carvalho, C. Nunes de; Brogueira, P.

doi:10.1016/j.tsf.2019.137604

Cited by 1 publication

(1 citation statement)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In this paper, we report on hybrid indium oxide electrodes with discontinuous Au layers exhibiting plasmonic properties. The thermal evaporation and plasma enhanced reactive thermal evaporation 13 (PERTE) techniques were used to deposit Au and InOx layers, respectively. A detailed description of the thin-film deposition and characterization methods is the starting point of this work.…”

Section: Introductionmentioning

confidence: 99%

An indium-oxide electrode with discontinuous Au layers for plasmonic devices

Vygranenko

Lavareda

André³

et al. 2020

Oxide-Based Materials and Devices XI

View full text Add to dashboard Cite

In this contribution we report on a low cost plasmonic electrode for light-sensing applications. The electrode combines a conducting nonstoichiometric indium oxide (InOx) layer with an ultrathin (~5 nm) discontinuous Au layer. The InOx and Au layers were deposited on glass substrates by plasma enhanced reactive thermal evaporation and thermal evaporation, respectively. Several device configurations with one or two Au layer(s) sandwiched between InOx layers were fabricated and characterized. The morphological and structural properties of both Au and InOx layers were analyzed using AFM and XRD techniques. In particular, the effect of thermal annealing (673 K, 15 min) on the surface morphology of Au layers grown on bare glass and InOx-coated substrate was investigated. It has been also found that the oxide film grown above an underlying nanostructured Au layer is amorphous, while a reference InOx film on glass is nanocrystalline with a smooth surface. The electrical properties of InOx grown on the Au surface are worsened due to Au-induced structural disorder. The observed difference in transmission spectra of the glass/InOx/Au and glass/Au/InOx structures indicates the difference in the morphology of the metal layer. Thus, the optical and morphological properties of the InOx electrode can be varied in a wide range by incorporating several Au layers.

show abstract

Section: Introductionmentioning

confidence: 99%