Concepts for the design of advanced nanoscale PVD multilayer protective thin films

Stueber, Michael; Holleck, H.; Leiste, H.; Seemann, K.; Ulrich, S.; Ziebert, Carlos

doi:10.1016/j.jallcom.2008.08.133

Cited by 274 publications

(130 citation statements)

References 131 publications

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“…As-deposited coatings resistance as compared to monolithic coatings [13,23]. The thickness of consecutive layers of CrN and NbN is defined as the bi-layer thickness.…”

Section: Resultsmentioning

confidence: 99%

“…In order to improve their behaviour, additional elements have been included in their composition such as Al, Ti, Nb and rare earths as Y or Zr [10][11][12]. Following other approach different arrangements of the coating multilayers have been also tested exploring the effect of alternating layers with thickness and composition variations [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

“…On the other hand NbN has a high chemical stability and improves wet corrosion resistance based on the formation of niobium oxide (Nb 2 O 5 ) [16,17]. The high number of interfaces related with the periodicity of the layers limits the propagation of cracks imparting CrN/NbN coating excellent tribo-corrosion resistance [13,18].…”

Section: Introductionmentioning

confidence: 99%

“…Any shadowed area will be depleted of the coating flux and can give rise to defective microstructure such as under-dense structures, porosity or weakened bonding with the surrounding material. The highly ionised plasmas in HIPIMS technique, which has a higher ratio of metal and gas ions to neutral as compared to other sputtering techniques [13] helps to overcome this problem. The highly ionised flux, under the influence of a suitable bias voltage, helps to improve ad-atom mobility, thereby improving the specimen coverage.…”

mentioning

confidence: 99%

See 3 more Smart Citations

Substrate Finishing and Niobium Content Effects on the High-Temperature Corrosion Resistance in Steam Atmosphere of CrN/NbN Superlattice Coatings Deposited by PVD-HIPIMS

et al. 2017

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“…As-deposited coatings resistance as compared to monolithic coatings [13,23]. The thickness of consecutive layers of CrN and NbN is defined as the bi-layer thickness.…”

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

mentioning

confidence: 99%

See 2 more Smart Citations

Substrate Finishing and Niobium Content Effects on the High-Temperature Corrosion Resistance in Steam Atmosphere of CrN/NbN Superlattice Coatings Deposited by PVD-HIPIMS

et al. 2017

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“…Soon after the first commercial application of single layer hard coatings for enhanced wear protection it was recognised that appropriately selected thin film materials can be combined as a multilayer system, leading to coating properties and performances significantly exceeding those of either constituent. Since then, the systematic selection of material combinations, the specific design of the multilayer architecture (e. g. individual layer thickness, interface constitution), the understanding of growth conditions, and the correlation between microstructure and properties are subject to intensive research in the field of multilayer wear resistant thin films [1,2,3,4]. Beyond the approach of improving the coating performance with respect to their passive functionality, studies were published focussing on the design of films which would be able to adapt their actual functionality in response to external influences as, for instance, environmental changes or mechanical load.…”

Section: Introductionmentioning

confidence: 99%

Epitaxially stabilized TiN/(Ti,Fe,Co)N multilayer thin films in (pseudo-)fcc crystal structure by sequential magnetron sputter deposition

Klever¹,

Seemann²,

Stüber³

et al. 2010

J. Phys. D: Appl. Phys.

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Abstract. Multilayer thin films were grown by non-reactive sequential magnetron sputter deposition from ceramic TiN and metallic FeCo targets addressing a combination of wear resistance and sensoric functionality. Coatings with bilayer period values ranging from 449 nm down to 2.6 nm were grown with the total amount of either material maintained constant. The multilayer thin films were post-annealed ex-situ at 600 C for 60 min in vacuum.X-ray diffraction results imply the multilayer thin films to undergo significant changes in its crystalline structure when the bilayer period is decreased. By using high resolution transmission electron microscopy as well as selected area electron diffraction it is shown that in case of multilayer thin films with bilayer periods of several ten nanometers and higher FeCo layers and TiN layers in their respective common CsCl and NaCl type crystal structures alternate. In contrast, in the multilayer thin films with bilayer periods of only a few nanometers, grain growth across the interfaces between the individual layers takes place and a strongly textured microstructure is formed which features columns in pseudo-fcc crystal structure grown in heteroeptaxial growth mode.It is suggested that the experimental findings imply the latter multilayer thin films to be alternately composed of TiN layers and (Ti,Fe,Co)N solid solution layers which have been formed by solid state reaction during the deposition process. As the consequence, epitaxially stabilised columnar grains in strongly textured pseudo-fcc structure are formed. This structure is preserved after the annealing procedure which qualifies these coatings for use in applications where temperatures of up to 600 C are reached.Confidential: not for distribution.

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Unraveling the Highly Plastic Behavior of ALD‐Aluminum Oxide Encapsulations by Small‐Scale Tensile Testing

Vogl,

Schweizer,

Minor

et al. 2024

Adv Eng Mater

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We present a study directly measuring the electron beam induced plasticity of amorphous Al2O3 coatings. Core‐shell nanostructures were employed as small‐scale model systems for 2D coatings made by atomic layer deposition (ALD). Copper nanowires (NWs) are used as substrates for ALD deposition, representing a model system for interconnects commonly found in integrated circuits. Experiments were performed in situ in a transmission electron microscope (TEM) and further analyzed with electron energy loss spectroscopy (EELS). Our in situ TEM tensile experiments reveal the highly plastic behavior of the ALD shell, which withstands a maximum strain of 188%. Comparable samples under beam‐off conditions show brittle fracture, which underlines the effect of electron irradiation. The electron‐beam activated bond switching within the amorphous network enables compensation of the applied tensile strain, leading to viscous flow. By incorporating an intermediate nanocrystalline layer within the Al2O3 shell, the plasticity is suppressed and brittle fracture occurs. This work directly demonstrates the tuning of mechanical properties in amorphous ALD structures through electron irradiation.This article is protected by copyright. All rights reserved.

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Concepts for the design of advanced nanoscale PVD multilayer protective thin films

Cited by 274 publications

References 131 publications

Substrate Finishing and Niobium Content Effects on the High-Temperature Corrosion Resistance in Steam Atmosphere of CrN/NbN Superlattice Coatings Deposited by PVD-HIPIMS

Substrate Finishing and Niobium Content Effects on the High-Temperature Corrosion Resistance in Steam Atmosphere of CrN/NbN Superlattice Coatings Deposited by PVD-HIPIMS

Epitaxially stabilized TiN/(Ti,Fe,Co)N multilayer thin films in (pseudo-)fcc crystal structure by sequential magnetron sputter deposition

Unraveling the Highly Plastic Behavior of ALD‐Aluminum Oxide Encapsulations by Small‐Scale Tensile Testing

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