Unraveling the Highly Plastic Behavior of ALD‐Aluminum Oxide Encapsulations by Small‐Scale Tensile Testing
Lilian M. Vogl,
Peter Schweizer,
Andrew M. Minor
et al.
Abstract:We present a study directly measuring the electron beam induced plasticity of amorphous Al2O3 coatings. Core‐shell nanostructures were employed as small‐scale model systems for 2D coatings made by atomic layer deposition (ALD). Copper nanowires (NWs) are used as substrates for ALD deposition, representing a model system for interconnects commonly found in integrated circuits. Experiments were performed in situ in a transmission electron microscope (TEM) and further analyzed with electron energy loss spectrosco… Show more
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