Concepts for Hybrid Micro Assembly Using Hot Melt Joining

Abstract

Nowadays, the production of 3D MEMS and MOEMS is carried out by using hybrid integration of single components, for which batch production is normally preferred. In this field, adhesive technology is one of the major joining techniques. At the Collaboration Research Center 516, a batch process based on a joining technique which uses hot melt adhesives was developed. This technique allows the coating of micro components with hot melt in a batch. The coating process is followed by the joining process. Due to this, the time between coating and joining can be designed variably. Because of the short set times of hot melt adhesives, short joining times are possible. For this assembly process adapted heat management is necessary. This paper presents adapted heating management concepts and gripping systems which allow a fast and accurate assembly of hybrid micro systems with hot melt coated components. Therefore, the chosen gripping system depends on the process and heat management concept as well as the thermal properties of the components. Furthermore, the simulative and experimental results of the heat management concepts will be discussed.

A micro-assembly station used for 3D reconfigurable hybrid MOEMS assembly

“…Indeed, optical components (lenses, mirrors, fiber holders, detectors, beam splitters) are microfabricated using "simple", well known and reliable processes [2], [3]. These components are then assembled together permitting the fabrication of complex 3D microstructures [4], [5], [6], [7]. The understanding of the microworld phenomena [8] and the automation of the micro-assembly tasks are currently under investigation.…”

Active force control for robotic micro-assembly: Application to guiding tasks

“…The integration of MEMS (Micro Electro Mechanical Sys-temS) and MOEMS (Micro Opto Electro Mechanical Sys-temS) technology in commercial products is growing especially in the field of telecommunication and sensor technology [1]. Heterogeneous microparts produced from various fabrication processes are frequently used for producing complex 3D microstructures through microparts micro-assembly tasks for example [2], [3], [4]. The use of a robotic workstation at the microscale which comprises a micromanipulator, high precision positioning stages, a set of visual systems and microforce sensors is commonly practiced.…”

Active Gripper for Hot Melt Joining of Micro Components

“…Therefore, special process components, such as fixtures and grippers as well as the heat management concepts should be developed. In [7] two approaches to solve these problems are described. The following section discusses these concepts and augments the approaches using a phase model.…”