“…Hybrid micro-systems are manufactured by a much broader range of micro-techniques, because parts are assembled to form the final micro-system after their manufacturing. Hybrid micro-systems demand for micro-assembly techniques, which might become very complex depending on the complexity of the system (Fatikow et al, 1999). The micro-assembling systems that exist today are usually only fit for a specific task and depend on the manual agility of an operator.…”