2013
DOI: 10.1007/s10404-013-1177-x
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Computer-aided microfluidics (CAMF): from digital 3D-CAD models to physical structures within a day

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Cited by 37 publications
(25 citation statements)
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“…A custom-made maskless lithography system based on a commercially available digital mirror device with 1024 × 768 individually addressable pixels and different optical components was used and has been previously described [15].…”
Section: Methodsmentioning
confidence: 99%
“…A custom-made maskless lithography system based on a commercially available digital mirror device with 1024 × 768 individually addressable pixels and different optical components was used and has been previously described [15].…”
Section: Methodsmentioning
confidence: 99%
“…Using the benchtop SL system we were able to create structures with a resolution of a few 100 μm. Using a custom‐built lithography system based on a digital mirror device which we have previously described we achieved resolutions fully compatible with the demands of microfluidics and microoptics . By consecutively illuminating several high resolution images next to each other (a process called stitching) we achieved a resolution of 200 μm on a centimeter area as can be seen from the Tesla Mixer in Figure A.…”
Section: Time Required For the Fabrication Of A Microfluidic Chip Usimentioning
confidence: 97%
“…The pattern to be generated is projected onto the samples using a digital mirror device (DMD). By adjusting light intensity and duration of exposure it is possible to produce both, black-and-white patterns as well as grayscale patterns [14].…”
Section: Lithographical Setupsmentioning
confidence: 99%
“…(b) For obtaining a higher resolution an advanced lithography setup for maskless projection lithography was used. This setup uses a digital mirror device as mask [14]. The light patterned by the digital mirror device is directed via a deflection mirror through the lens onto the substrate located on top of the setup.…”
Section: Materials Used For Protein Patterningmentioning
confidence: 99%