Computational Model for Predicting Coating Thickness in Electron Beam Physical Vapor Deposition

Fuke, I.; Prabhu, Vittaldas V.; Baek, Seong Kyu

doi:10.1016/s1526-6125(05)70091-8

Cited by 26 publications

(23 citation statements)

References 12 publications

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“…Fuke et al presented a generic computational model based on the cosine law of evaporation for predicting coating thickness on complex workpieces (87). Here, the surface of the workpiece is indicated as a mesh of finite elements.…”

Section: Fabrication Of Coatingsmentioning

confidence: 99%

PVD Technology in Fabrication of Micro- and Nanostructured Coatings

Mahmood

Ali

2014

Comprehensive Materials Processing

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Section: Fabrication Of Coatingsmentioning

confidence: 99%

PVD Technology in Fabrication of Micro- and Nanostructured Coatings

Mahmood

Ali

2014

Comprehensive Materials Processing

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“…As the second deposition process model, based on the Schiller's model which modelled the normalised value for the coating film thickness with respect to the one at a50 for a flat plate stationary above the evaporator source for a constant rate of evaporation (Schiller et al, 1982), Fuke et al (2005) proposed the mathematical model to calculate the coating thickness as following…”

Section: Deposition Process Modelmentioning

confidence: 99%

“…A generic computational model for predicting coating thickness was proposed by Fuke et al (2005) because of the difficulty to derive analytical models to predict coating thickness for substrates with complex geometries like turbine blades. In this paper, a unified dynamic computational model is proposed to combine the machine dynamic models and the deposition process models developed in the previous section.…”

Section: Unified Dynamics Computational Modelmentioning

confidence: 99%

“…8 as time increases. In Table 4, the simulation results d 3 by Fuke et al (2005), which was based on the point vapour source with constant power of cosine n, is also compared as a reference. The d 1 and d 2 in Table 4 were obtained at 19?59, 26?48, 230?67 and 32?64u of divergence angle respectively, because of the discrepancy between mesh and real measure points.…”

Section: Cylinder Rod Coated With Tungstenmentioning

confidence: 99%

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Finite element model for unified EB–PVD machine dynamics

Baek

Prabhu

2007

Surface Engineering

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The present paper presents finite element models to describe machine dynamics, such as electron beam (EB) generation in an EB gun, EB scanning on the surface of an ingot, melting process of the ingot, and vaporisation and deposition on the surface of a substrate during EB-PVD process. Based on physical models, the finite element models relate the input power to the EB gun and the temperature profile of the ingot surface, the temperature profile to the shape of vapour plume, and the vapour distribution to the coating thickness. The two deposition process models have been investigated for predicting the coating thickness and compared to experiments performed for simple shaped substrates. With preliminary studies, it is found that the presented models are suitable for a cost efficient computation and can aid in assessing process parameters.

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“…The kinetics of evaporation and vapor transport as well as deposition rate were simplified in reduced order models and a macroscopic balance was established between the intermediate process parameters, such as ingot temperature and deposition rate, and the input parameters [12]. The authors have developed a simulation tool to predict the coating thickness for simple geometric shapes such as the flat plate and the cylinder coated with titanium and tungsten, respectively [13,14]. The microscopic process of coating growth, however, cannot be accurately predicted using these models for the EB-PVD process.…”

Section: Introductionmentioning

confidence: 99%