Computational and quasi-analytical models for non-linear vibrations of resonant MEMS and NEMS sensors

Kacem, Najib; Baguet, Sébastien; Hentz, Sébastien; Dufour, Régis

doi:10.1016/j.ijnonlinmec.2010.12.012

Cited by 73 publications

(45 citation statements)

References 36 publications

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“…For the single microbeam, we solve for the k i in Equation (11), whereas for double microbeam we solve for f i , and g i in the coupled Equation (12a,b), and this can be done by several methods like the harmonic balance method coupled with the asymptotic numerical method [33,34], which enables the capture of stable and unstable branches or using the so-called Newton's method. We adopted the latter approach by using the command FindRoot in Mathematica software.…”

Section: Static Analysismentioning

confidence: 99%

Structural Behavior of a Multi-Layer Based Microbeam Actuator

2016

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Abstract:In this paper, the structural behavior of a micro-electromechanical system (MEMS) composed of two electrically coupled parallel clamped-clamped microbeams is investigated. An Euler Bernoulli beam model is considered along with the nonlinear electric actuating force to get the equation of motion governing the structural behavior of the actuator. A reduced-order modeling (ROM) based on the Galerkin expansion technique, while assuming linear undamped mode shapes of a straight fixed-fixed beam as the basis functions, is assumed as a discretization technique of the equations of motion in this investigation. The results showed that the double-microbeam MEMS actuator configuration requires a lower actuation voltage and a lower switching time as compared to the single microbeam actuator. Then, the effects of both microbeams air gap depths were investigated. Finally, the eigenvalue problem was investigated to get the variation of the fundamental natural frequencies of the coupled parallel microbeams with the applied actuating DC load.

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Section: Static Analysismentioning

confidence: 99%

Structural Behavior of a Multi-Layer Based Microbeam Actuator

2016

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“…Nevertheless, in our case (simple beam resonators), the first mode can be considered as the dominant mode of the system and the higher modes can be neglected. This has been demonstrated numerically using time integration [7] as well as shooting and harmonic balance method coupled with an asymptotic numerical continuation technique [24]. Thus, only one mode is considered (n = 1).…”

Section: Solvingmentioning

confidence: 99%

Pull-In Retarding in Nonlinear Nanoelectromechanical Resonators Under Superharmonic Excitation

Kacem

Baguet

Hentz

et al. 2012

Journal of Computational and Nonlinear Dynamics

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In order to compensate for the loss of performance when scaling resonant sensors down to NEMS, a complete analytical model including all main sources of non linearities is presented as a predictive tool for the dynamic behavior of clamped-clamped nanoresonators electrostatically actuated. The nonlinear dynamics of such NEMS under superharmonic resonance of order half their fundamental natural frequencies is investigated. It is shown that the critical amplitude has the same dependence on the quality factor Q and the thickness h as the case of the primary resonance. Finally, a way to retard the pull-in by decreasing the AC voltage is proposed in order to enhance the performance of NEMS resonators.

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“…With the rapid development of technology, functionally graded (FG) beams and plates are often used in MEMS/NEMS, such as the components in the shape of memory thin films alloy with a global thickness in the micro/nano scale, atomic force microscopes (AFMs), and electrically actuated MEMS devices [1][2][3][4][5][6][7][8]. As opposed to the strain theories which were introduced by Mindlin and Eshel [9], with five constants besides the Lamé constants, Lam et al [1] presented a modified theory consisting of only three non-classical constants.…”

Section: Introductionmentioning

confidence: 99%