2011
DOI: 10.1016/j.actamat.2011.02.036
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Compressive flow behavior of Al–TiN multilayers at nanometer scale layer thickness

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Cited by 135 publications
(56 citation statements)
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“…The Al is confined by the TiN that is still undergoing only elastic deformation. This confinement generates the high work-hardening rates in the Al and CLS is the dominant mechanism for Al thicknesses in the range from 30 nm down to approximately 5 nm at which point the stresses necessary for dislocation motion within the aluminium becomes so high that it is energetically favourable for the dislocations to transmit across the Al-TiN interface, enabling co-deformation of the metal and ceramic layers [32].…”
Section: Resultsmentioning
confidence: 99%
“…The Al is confined by the TiN that is still undergoing only elastic deformation. This confinement generates the high work-hardening rates in the Al and CLS is the dominant mechanism for Al thicknesses in the range from 30 nm down to approximately 5 nm at which point the stresses necessary for dislocation motion within the aluminium becomes so high that it is energetically favourable for the dislocations to transmit across the Al-TiN interface, enabling co-deformation of the metal and ceramic layers [32].…”
Section: Resultsmentioning
confidence: 99%
“…2b). 36 The deformed pillar shows no sign of localized shear, and appears to have undergone homogeneous deformation, with no detectable roughening of the pillar surface that could correspond to plastic flow in the Al phase alone. The corresponding stress-strain curves for the 2 nm Al/2 nm TiN sample, as well as the 18 nm Al/2 nm TiN material are shown in Fig.…”
Section: Ex Situ Observation Of Tin Plasticity In Al-tin Nanolayered mentioning
confidence: 97%
“…The measurements presented here showed that the strain hardening values exhibit a strong size effect tied to the layer thickness as well as to the layer thickness ratio. 36 The interfaces between Al and TiN are expected to be strong barriers for dislocation motion, and mobility of dislocations in TiN is expected to be relatively low, so the high strength is easily explained. However, the strain hardening rates due to plastic deformation in Al for the 2 nm Al/2 nm TiN case range from 16 to 35 GPa in Fig.…”
Section: Ex Situ Observation Of Tin Plasticity In Al-tin Nanolayered mentioning
confidence: 99%
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“…However, these methods were developed with homogeneous materials in mind, including the assumption that elastic recovery occurs during the indentation unloading phase (Tang et al, 2010). Multilayered configurations introduce complex internal stress and strain behaviors, which may affect the derived mechanical property values in ways not yet understood (Bhattacharyya et al, 2011;Jamison and Shen, 2016). Prior work in this area has investigated elastic modulus, hardness, plastic deformation during unloading, imperfect layer geometry, and delamination Tang et al, 2008Tang et al, , 2010Wang et al, 2012;Jamison and Shen, 2016).…”
Section: Introductionmentioning
confidence: 99%