2003
DOI: 10.1016/s0921-4534(02)02255-4
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Composition depth profiles of superconducting MgB2 thin films determined by ion beam analysis methods

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Cited by 11 publications
(4 citation statements)
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“…A variation of the two-step annealing technique is to anneal the precursor film in situ after its deposition in Mg vapor generated locally from the excess Mg in the precursor film. The precursor films or multilayers of MgB 2 , Mg+ MgB 2 , or Mg + B, are deposited at room temperature to 300 • C, by pulsed laser deposition [3,9,13,[29][30][31][32][33][34], sputtering [35][36][37], thermal evaporation [21], or e-beam evaporation [38][39][40]. They are then heated up in the growth chamber to different annealing temperatures and for different durations such that the MgB 2 phase can form but not decompose (the local Mg vapor pressure changes and eventually drops), requiring a careful balancing between these processes.…”
Section: Annealing Of B Films In Mg Vapormentioning
confidence: 99%
“…A variation of the two-step annealing technique is to anneal the precursor film in situ after its deposition in Mg vapor generated locally from the excess Mg in the precursor film. The precursor films or multilayers of MgB 2 , Mg+ MgB 2 , or Mg + B, are deposited at room temperature to 300 • C, by pulsed laser deposition [3,9,13,[29][30][31][32][33][34], sputtering [35][36][37], thermal evaporation [21], or e-beam evaporation [38][39][40]. They are then heated up in the growth chamber to different annealing temperatures and for different durations such that the MgB 2 phase can form but not decompose (the local Mg vapor pressure changes and eventually drops), requiring a careful balancing between these processes.…”
Section: Annealing Of B Films In Mg Vapormentioning
confidence: 99%
“…The appearance of the droplets was eliminated when the precursors were annealed in Ar instead of Mg vapour [5]. However, this approach requires a very precise balance of the processing parameters to get singlephase MgB 2 films because several competing processes take place simultaneously, which are the diffusion of B and Mg, sublimation of Mg and formation/decomposition of the MgB 2 phase depending on the local content of Mg. As the result, impurity phases, either metallic Mg or B-rich MgB 4 and MgB 6 compounds, appear and the homogeneity of the films is degraded [6,7]. In the present work we studied an intermediate approach for the annealing of multilayer B/Mg precursors in a flow of Mg vapour.…”
mentioning
confidence: 99%
“…Precursor films or multilayers of MgB 2 , Mg + MgB 2 , or Mg + B, are deposited at room temperature to 300 • C, and then annealed in situ in the growth chamber at temperatures and duration such that severe Mg loss or MgB 2 decomposition does not occur. The precursor films may be deposited by pulsed laser deposition [10,35,38,53,54,57,55,56], sputtering [58][59][60], or thermal evaporation [47], or e-beam evaporation [61][62][63]. During the annealing, Mg sublimes or evaporates, MgB 2 phase forms, nucleation and growth of crystallites takes place, and MgB 2 decomposes.…”
Section: Intermediate-temperature Processesmentioning
confidence: 99%