2012
DOI: 10.1103/physrevb.86.085123
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Composition-dependent oxygen vacancy formation in multicomponent wide-band-gap oxides

Abstract: The formation and distribution of oxygen vacancy in layered multicomponent InAM O4 oxides with A 3+ =Al or Ga, and M 2+ =Ca or Zn, and in the corresponding binary oxide constituents is investigated using first-principles density functional calculations. Comparing the calculated formation energies of the oxygen defect at six different site locations within the structurally and chemically distinct layers of InAM O4 oxides, we find that the vacancy distribution is significantly affected not only by the strength o… Show more

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Cited by 17 publications
(11 citation statements)
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References 52 publications
(43 reference statements)
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“…It is obvious that Ti2O3 is the only oxide with cation vacancy, while the others, have lower anion vacancy energies. These results are in good agreement with previous work [16][17][18][19][20][21][22][23].…”
Section: Calculation Resultssupporting
confidence: 93%
“…It is obvious that Ti2O3 is the only oxide with cation vacancy, while the others, have lower anion vacancy energies. These results are in good agreement with previous work [16][17][18][19][20][21][22][23].…”
Section: Calculation Resultssupporting
confidence: 93%
“…The observed trends may be caused by oxygen vacancy variations, which determine the final free electron concentration in the sputtered films. In keeping with the study of A. Murrat [14] and G. H. Kim [15], oxygen vacancy distribution exhibits a trend with respect to Ga in InGaZnO4, since the Ga ions have a stronger chemical bond with oxygen compared to Zn and In atoms. Accordingly, we can conclude that with increasing Ga atomic content the electron concentration is suppressed and the IGZO films' conductivity steeply decreases.…”
Section: Resultssupporting
confidence: 85%
“…35 In the near-VBM state, the localized states are reportedly occupied by electron-acceptors which consist of oxygen sites and low valence cations (In 3+ from In 4d and 5s). 13 In the near-CBM state, on the other hand, the band consists of electron-donors. The donor-type states are occupied at a neutral charge and can provide electrons by ionization.…”
Section: (I) Oh As a Decomposition Agentmentioning
confidence: 99%
“…These charge defects include metal interstitials, oxygen deficiencies, and carbon impurities. For In 2 O 3 , oxygen deficiency formation is inevitable owing to its low formation energy, 13 and therefore oxygen binders such as Hf, W, and Si must be doped to achieve a low trap density which leads to high quality In 2 O 3 -based films. 14,15 The addition of dopants requires higher annealing temperatures to achieve a satisfactory level of field effect mobility as that of undoped In 2 O 3 .…”
Section: Introductionmentioning
confidence: 99%