Complex Range Resolution Model of Point Scatterers in LFM Chirp Pulse Radar

Park, Jong Hoo; Park, Sang Chul

doi:10.1109/tim.2022.3204082

Cited by 5 publications

(1 citation statement)

References 17 publications

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“…Linear frequency modulation (LFM), also known as chirp signals or linear sweep signals, is commonly used in various fields such as sonar, radar, laser, and spread spectrum communications. [21][22][23][24] LFM signals offer high resolution due to their large time width and bandwidth, making them suitable for NDT. Using an LFM SAW-IDT, a continuous broadband dispersion curve of SAW propagation can be obtained.…”

Section: Introductionmentioning

confidence: 99%

Simultaneous Determination of Young's Modulus and Density of Ultrathin Low‐k Films Using Surface Acoustic Waves

Zhang,

Xiao,

Zhang

et al. 2024

Physica Status Solidi (a)

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The nondestructive testing (NDT) of mechanical properties in ultrathin low dielectric constant (low‐k) films is a major challenge in integrated circuit manufacturing. Young's modulus and density are closely related parameters for low‐k films. This study presents a method for NDT of Young's modulus and density of porous low‐k black diamond (SiOC:H, BD) films. A linear frequency modulation (LFM) surface acoustic wave (SAW) interdigital transducer (IDT) with a frequency range of 20–250 MHz is designed to generate SAW signals on the samples. The series of SAW waveforms obtained on the samples are processed to obtain experimental SAW dispersion curves across a broad frequency range. By comparing these experimental curves with theoretical dispersion curves, as well as their first‐order derivatives, Young's modulus and density of porous low‐k BD films with thicknesses of 100, 300, 500, and 1000 nm are characterized. To verify Young's modulus measurements from the SAW method, a control experiment using nanoindentation is conducted. The results demonstrate that the SAW method can reduce the impact of the substrate and is independent of the film thickness. This study presents a highly accurate measuring method for simultaneous multiparameter evaluation of ultra‐thin low‐k films.

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Section: Introductionmentioning

confidence: 99%