Complex dynamics of carbon nanotube probe tips

Lee, S.I.; Howell, Stephen W.; Raman, Arvind; Reifenberger, R.; Nguyen, Cattien V.; Meyyappan, M.

doi:10.1016/j.ultramic.2004.09.012

Cited by 24 publications

(24 citation statements)

References 15 publications

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“…These differences are probably due to the difference in bending stiffnesses of longer and shorter CNT tips. This in turn affects the buckling loads and the buckling mode of the CNTs on a specific surface [11]. The discussion above can be easily extended to include any additional attractive interaction forces including electrostatic forces.…”

Section: Attractive Regime Imaging Verification Using Amplitude-distamentioning

confidence: 99%

Imaging artefacts in atomic force microscopy with carbon nanotube tips

Strus¹,

Raman²,

Han³

et al. 2005

Nanotechnology

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Dynamic atomic force microscopy (dynamic AFM) with carbon nanotube tips has been suggested as an enabling tool for high precision nanometrology of critical dimension features of semiconductor surfaces. We investigate the performance of oscillating AFM microcantilevers with multi-walled carbon nanotube (multi-walled CNT) tips interacting with high aspect ratio structures while in the attractive regime of dynamic AFM. We present experimental results on SiO 2 gratings and tungsten nanorods, which show two distinct imaging artefacts, namely the formation of divots and large ringing artefacts that are inherent to CNT AFM probe operation. Through meticulous adjustment of operating parameters, the connection of these artefacts to CNT bending, adhesion, and stiction is described qualitatively and explained.

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Section: Attractive Regime Imaging Verification Using Amplitude-distamentioning

confidence: 99%

Imaging artefacts in atomic force microscopy with carbon nanotube tips

Strus¹,

Raman²,

Han³

et al. 2005

Nanotechnology

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“…These mechanical responses of the nanotube tips have great influence in scanning probe microscopy due to the various interaction possibilities with the substrate. 23,27,28 In this work, the AFM was operated in contact mode, thus allowing for fine adjustment of the deflection set point to control the force applied to the carbon nanotube in physical contact with the substrate. A conventional Si tip, without an attached nanotube, would show a linearly increasing deflection in the force versus distance curve after the initial contact of the Si tip with the surface is established.…”

Section: Resultsmentioning

confidence: 99%

Electrical conduction of carbon nanotube atomic force microscopy tips: Applications in nanofabrication

Austin

Nguyen

Ngo

2006

Journal of Applied Physics

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This paper reports the electrical transport properties of the interface of a multiwalled carbon nanotube (MWNT) in physical end contact with a hydrogen-passivated Si surface and a Pt surface. The electrical measurement was performed in an atomic force microscope (AFM) with a MWNT attached to a scanning probe in contact mode at approximately 50% relative humidity. AFM force-distance spectroscopy was employed to set the degree of contact between the MWNT tip with the surface. The tip-substrate interface dominates the electrical measurement in this configuration, showing electrical conductivity characteristics indicative of the tip-substrate junction. MWNT tips in contact with a Pt surface exhibit a linear I-V behavior with electrical resistances in the range of 30–50kΩ, demonstrating the metallic nature of the MWNT. Results are presented for the investigation of the current-induced joule heating limitations of MWNT tips under ambient conditions. Thinning of the outer walls through a current-induced thermal oxidation process is observed at a current greater than 5μA, exhibiting a current density of greater than 106A∕cm2. For a MWNT tip in end contact with a highly p-doped silicon surface, a diode-like metal-insulator-semiconductor (MIS) junction is measured. Modeling of the MIS junction is presented and compared to the experiments.

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“…In other investigations, probes with special tip geometries, e.g. flared tip [19], trident shaped probe [20], boot-shaped tip [21,22] and assembled probe [23] were used to scan steep sidewalls. Their application is limited to specialized measurements or provide low surface resolution due to comparatively big tip radius and a complex blind estimation would be required for accurate CD measurements [24,25].…”

Section: Introductionmentioning

confidence: 99%