Complementary-Switchable Dual-Mode SHF Scandium Aluminum Nitride BAW Resonator

Mo, Dicheng; Dabas, Shaurya; Rassay, Sushant; Tabrizian, Roozbeh

doi:10.1109/ted.2022.3183963

Cited by 29 publications

(11 citation statements)

References 29 publications

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“…These devices could be matched to 50 , but suffered from relatively large losses and the demonstrated quality factors (Q s ) were below 200, making them far less competitive with respect to alternative electromagnetic-based filtering technologies in terms of resulting filter losses and roll-off. Works by the MEMS community [112], [113], [114], [115], [116], [117] have confirmed that the same AlN films or doped films can operate at these frequencies and in topologies, which support either higher quality factors (Q ≈ 500) or large coupling (k 2 ≈ 10%). The integration of resonators in advanced CMOS processes [118] has facilitated the insertion of innovative phononic crystal designs into electrostrictive acoustic resonators, which have exhibited exceptionally high-Q in excess of 10,000 at mm-wave frequencies.…”

Section: A Overview Of Mm-wave Acoustic Resonatorsmentioning

confidence: 93%

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

et al. 2023

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This paper reviews the latest developments in microwave acoustic wave devices. After an introduction and brief history of bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices, a review is given for guided SAWs and XBARs -two new technologies, which are promising for future 5G applications. Following this, we discuss recent simulation techniques, such as 3D finite element method (3D FEM) and simulation of nonlinearities, as well as filter synthesis. Next, a review on tunable and reconfigurable acoustics is given. Finally, we present the latest developments in microwave acoustics for millimeter-wave (mm-wave) operation as well as BAW oscillators.INDEX TERMS Bulk acoustic wave (BAW) devices, filter, filter-synthesis, front-end, high power, MTT 70th Anniversary Special Issue, multiplexer, nonlinearity, resonator, surface acoustic wave (SAW) devices.

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Section: A Overview Of Mm-wave Acoustic Resonatorsmentioning

confidence: 93%

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

et al. 2023

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“…In other words, it is optimal to have the ratio between piezoelectric stress coefficient and permittivity spatially correlated to the strain profile of the desired mode, as is discussed in existing designs [1], [2], [4], [5]. Therefore, when designing multilayer structures, it is preferable to have the material interfaces placed at the zero strain locations, resulting in half wavelength per layer at the eigenfrequency ω i (the parallel resonance frequency).…”

Section: A Electrical Excitation Of Vibrations In An Fbarmentioning

confidence: 99%

“…A previous work observed through simulations that for these resonators with thick electrodes, low characteristic acoustic impedance are preferred in electrodes in an overmoded structure [1]. Other works discussed mode selection in a multilayer structure with alternating polarities of identical piezoelectric layers but simplified the contribution of electrodes in their discussions [5]. There has been no quantification in the contribution of electrodes to the electromechanical coupling coefficient in such multilayer structures.…”

Section: Introductionmentioning

confidence: 99%

Electrode Effects in mmWave Frequency Multilayer Bulk Acoustic Wave Resonators

Peng¹

2023

Preprint

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<p>Electrodes are present in acoustic resonators to set electrical boundary conditions. Electrodes are acoustically part of a bulk acoustic wave (BAW) resonator that affect both its electromechanical coupling coefficient and its quality factor. Calculation of electromechanical coupling coefficient in multilayer structures requires the analysis of a system of equations relating the waves inside each layer to those in its adjacent layers. In this work, layer thicknesses and material constants in each layer are used to calculate the series and parallel resonance frequencies. Due to the proximity in frequency of series and parallel resonance, a series expansion of the series resonance frequency equation is performed around the parallel resonance frequency, and a closed form expression for electromechanical coupling coefficient from material constants and layer thicknesses is obtained to facilitate the observation of the electromechanical coupling coefficient effects of electrodes. Thermoelastic damping (TED) has been identified as the dominant acoustic loss mechanism in conductors. In this work, the complex wavenumber is calculated based on the unified theory of thermoelasticity to incorporate acoustic loss due to the interaction between elastic deformation and heat flow. Acoustic quality factors due to TED for common metals in microelectromechanical systems (MEMS) processing are calculated to facilitate the observation of the quality factor effects of electrodes. It is observed that there exists tradeoff among electromechanical coupling coefficient, acoustic quality factor, and electrical conductivity in the selection of electrode metals.</p>

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“…In other words, it is optimal to have the ratio between the piezoelectric stress coefficient and permittivity spatially correlated to the strain profile of the desired mode, as is discussed in existing designs [1], [2], [4], [5]. Therefore, when designing multilayer structures, it is preferable to have the material interfaces placed at the zero strain locations, resulting in half wavelength per layer at ω i .…”

Section: Electromechanical Coupling Coefficient a Electrical Excitati...mentioning

confidence: 99%

“…A previous work mentioned that for these resonators with thick electrodes, low characteristic acoustic impedance are preferred in electrodes in an overmoded structure [1]. Other works discussed mode selection in a multilayer structure with alternating polarities of identical piezoelectric layers but simplified the contribution of electrodes in their discussions [5]. There has been no quantification in the contribution of electrodes to the electromechanical coupling coefficient in such multilayer structures.…”

Section: Introductionmentioning

confidence: 99%

Electrode Effects in mmWave Frequency Multilayer Bulk Acoustic Wave Resonators

Peng¹

2023

Preprint

View full text Add to dashboard Cite

<p>Electrodes are present in acoustic resonators to set electrical boundary conditions. Electrodes are acoustically part of a bulk acoustic wave (BAW) resonator that affect both its electromechanical coupling coefficient and its quality factor. In this work, layer thicknesses and material constants in each layer are used to calculate the series and parallel resonance frequencies. For half wavelength per layer structures, a closed-form expression for electromechanical coupling coefficient from material constants is obtained to facilitate the observation of the electromechanical coupling coefficient effects of electrodes. Thermoelastic damping (TED) has been identified as the dominant acoustic loss mechanism in conductors. In this work, the complex wavenumber is calculated based on the unified theory of thermoelasticity to incorporate acoustic loss due to the interaction between elastic deformation and heat flow. Acoustic quality factors due to TED for common metals in microelectromechanical systems (MEMS) processing are calculated to facilitate the observation of the quality factor effects of electrodes. It is observed that there exists a tradeoff among electromechanical coupling coefficient, acoustic quality factor, and electrical conductivity in the selection of electrode metals.</p>

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Complementary-Switchable Dual-Mode SHF Scandium Aluminum Nitride BAW Resonator

Cited by 29 publications

References 29 publications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

Electrode Effects in mmWave Frequency Multilayer Bulk Acoustic Wave Resonators

Electrode Effects in mmWave Frequency Multilayer Bulk Acoustic Wave Resonators

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