Abstract:<p>Electrodes are present in acoustic resonators to set electrical boundary conditions. Electrodes are acoustically part of a bulk acoustic wave (BAW) resonator that affect both its electromechanical coupling coefficient and its quality factor. In this work, layer thicknesses and material constants in each layer are used to calculate the series and parallel resonance frequencies. For half wavelength per layer structures, a closed-form expression for electromechanical coupling coefficient from material co… Show more
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