“…In this work, the DR model 12 ( DReaM-ALD 31 ) will be referred to as Model A , while the Markov chain based BTR model 10 ( Machball 32 ) will be called Model B . Furthermore, this work will refer to the ALD counter-reactants as Reactant A and Reactant B, with Reactant A being the metal precursor of the process, denoted by subscript ‘A’.…”