Comparison of the properties of titanium dioxide films prepared by various techniques

Bennett, Jean M.; Pelletier, E.; Albrand, G.; Borgogno, J. P.; Lazaridès, Basile; Carniglia, C. K.; Schmell, Rodney A.; Allen, Thomas H.; Tuttle-Hart, Trudy; Guenther, Karl H.; Saxer, Andreas

doi:10.1364/ao.28.003303

Cited by 243 publications

(77 citation statements)

References 19 publications

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“…Rutile and anatase TiO 2 films are widely used in various industrial applications [1][2][3]. For example, rutile TiO 2 films are used as an optical coating material because of their high refractive index whereas anatase TiO 2 films are utilised as photocatalysts or transparent electrodes [3].…”

Section: Introductionmentioning

confidence: 99%

On the Crystal Structural Control of Sputtered TiO2 Thin Films

et al. 2016

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In this study, we focused on the origin on the selective deposition of rutile and anatase TiO 2 thin films during the sputtering process. The observation on microstructural evolution of the TiO 2 films by transmission electron microscopy revealed the coexistence of rutile and anatase TiO 2 phases in the initial stage under the preferential growth conditions for the anatase TiO 2 ; the observations further revealed that the anatase phase gradually dominated the crystal structure with increasing film thickness. These results suggest that the bombardment during the sputtering deposition did not obviously affect the TiO 2 crystal structure, and this was also confirmed by off-axis magnetron sputtering experiments. We also investigated the mechanism of the effect of Sn impurity doping on the crystal structure using first-principles calculations. It is found that the formation energy of Sn-doped rutile TiO 2 is lower than that of Sn-doped anatase TiO 2 ; this suggests that the Sn-doped TiO 2 favours the rutile phase. These results offer a guideline for the utilization of selective deposition of rutile and anatase TiO 2 thin films in various industrial applications.

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Section: Introductionmentioning

confidence: 99%

On the Crystal Structural Control of Sputtered TiO2 Thin Films

et al. 2016

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“…For example, the measurement of reflection and transmission coefficients [3][4][5][6] and the spectroscopic ellipsometry [7][8][9] lead to refractive index, thickness, and extinction factor measurement.…”

Section: Introductionmentioning

confidence: 99%

Determination of refractive index, thickness, and the optical losses of thin films from prism-film coupling measurements

Cardin

Leduc²

2008

Appl. Opt.

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To cite this version:Julien Cardin, Dominique Leduc. Determination of refractive index, thickness, and the optical losses of thin films from prism-film coupling measurements. Applied optics, Optical Society of America, 2008, 47 (7) We present a method of analysis of prism-film coupler spectroscopy based on the use of transfer matrix and genetic algorithm, which allows the simultaneous determination of refractive index, thickness, and optical losses of the measured layer.

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“…(1)(2)(3)(4). The refractive index data of TiO2 films is modeled by Wvase32 software by considering layered structure as shown in figure 1.…”

Section: Theorymentioning

confidence: 99%

“…Various techniques such as vacuum evaporation and sputtering have been investigated for the deposition of TiO2 coatings [4]. The use of Atomic Layer Deposition (ALD) shows promise for low cost and large scale production of thin, high index, dense and amorphous TiO2 films with high optical quality.…”

Section: Introductionmentioning

confidence: 99%