2002
DOI: 10.1016/s0167-9317(01)00589-5
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Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-k SiO2 xerogel films

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Cited by 67 publications
(31 citation statements)
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“…A similar behavior was observed for the hardness, where the values were reduced from 1.21 GPa for HMSQ film to 0.71 and 0.39 GPa for 10:90 and 20:80 PAMAM:HMSQ films, respectively. The results that increased porosity compromised the mechanical properties of the films agree well with the literature [20][21][22]. Nevertheless, higher elastic modulus and hardness were found for present samples compared to the literature values.…”
Section: The Mechanical Properties Of the Templated Filmssupporting
confidence: 91%
“…A similar behavior was observed for the hardness, where the values were reduced from 1.21 GPa for HMSQ film to 0.71 and 0.39 GPa for 10:90 and 20:80 PAMAM:HMSQ films, respectively. The results that increased porosity compromised the mechanical properties of the films agree well with the literature [20][21][22]. Nevertheless, higher elastic modulus and hardness were found for present samples compared to the literature values.…”
Section: The Mechanical Properties Of the Templated Filmssupporting
confidence: 91%
“…Further examples comprise the Young's modulus measurements of low-k films by the bulge test [12], elipsometric porosimetry [13], surface acoustic wave spectroscopy followed by the best fit between experimental and theoretical frequency-dependent velocity dispersion curves [14,15], or the first convincing measurement of Poisson's ratio of porous low-k layers using Brillouin light scattering [14]. Moreover, Paik et al [16] predicted recently the failure of Cu/low-k interconnects based on their FEM-aided analysis, Damayanti et al [17] employed bending and nanoscratch to determine elastic properties and adhesion of low-k films, while Xiao et al [18] advertised their characterization of elastic parameters by laser generated surface acoustic waves.…”
Section: Introductionmentioning
confidence: 99%
“…To further illustrate the unique position of nano-architected materials, Figure 3c compares the hollow alumina nanolattices to several other material systems whose porosity can be varied through processing: hyperbranched poly(amidoamine) conjugated silica (HBPCS) (RD 30-90%), 41 silica xerogel (RD 45-64%), 42 silica aerogel (RD 32-40%), 43 and polyimide aerogel with varying amounts of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride (6FDA) in 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 the backbone of the polyimide (0% 6FDA RD 11-16%, 50% 6FDA RD 5.3-8.1%). 28 The dashed contour represents the same scaling as one shown in Figure 3b for nanolattices with relative densities between 1% and 10%.…”
mentioning
confidence: 99%