38th ARFTG Conference Digest 1991
DOI: 10.1109/arftg.1991.324040
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Comparison of On-Wafer Calibrations

Abstract: A powerful new verification technique determines the measurement accuracy of scattering parameter calibrations. The technique determines the relative reference impedance, reference plane offset, and the worst-case measurement deviations of any calibration from a benchmark calibration. The technique is applied to several popular on-wafer scattering parameter calibrations, and the deviations between those calibrations and the thru-reflect line calibration are quantified.

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Cited by 190 publications
(73 citation statements)
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“…Fig. 6 shows a comparison of calibration coefficients for the four sets of measurements following the technique presented in [35]. This technique evaluates the worst-case deviations of the measured S-parameters for an examined calibration with respect to a benchmark calibration.…”
Section: Results and Analysismentioning
confidence: 99%
“…Fig. 6 shows a comparison of calibration coefficients for the four sets of measurements following the technique presented in [35]. This technique evaluates the worst-case deviations of the measured S-parameters for an examined calibration with respect to a benchmark calibration.…”
Section: Results and Analysismentioning
confidence: 99%
“…They also show a close match with the impedances from MTRL calibrations, which proves the validity of the proposed LRRM in terms of shunt load characterization. The LRM, LRMM, and LRRM calibrations are compared with on-wafer MTRL calibrations using the calibration comparison technique [28]. Calibration comparison is a known method for comparing two calibrations.…”
Section: Measurementsmentioning
confidence: 99%
“…As a conclusion, LRM, LRMM, and LRRM all show good accuracies up to 110 GHz. The LRM, LRMM, and LRRM calibrations are compared with on-wafer MTRL calibrations using the calibration comparison technique [28]. Calibration comparison is a known method for comparing two calibrations.…”
Section: Measurementsmentioning
confidence: 99%
“…We used the calibration comparison method of [13] to investigate the impact of the displaced line on calibration accuracy. The calibration comparison method determines a bound on the worst-case differences of the scattering parameters of two passive devices measured by the two calibrations.…”
Section: A Imperfect Line Standardmentioning
confidence: 99%