Comparison of hybrid pixel detectors with Si and GaAs sensors

Lindner, Markus; Fischer, P.; Florin, Sébastien; Göppert, R.; Hausmann, Joachim; Ludwig, J.; Runge, K.; Schwarz, C.; Söldner-Rembold, A; Wermes, N.

doi:10.1016/s0168-9002(01)00826-9

Cited by 12 publications

(7 citation statements)

References 10 publications

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“…Schottky sensors are ordinarily made from bulkgrown i-GaAs [1,7,10,16,[31][32][33][34][35][36][37][38][39][40]. Wafers are lapped to a required thickness and polished, and the disturbed layer is then removed by wet etching.…”

Section: Fabrication Technology For the Sensing Portion Of A Hybrid Dmentioning

confidence: 99%

“…With Ti/Pt/Au contacts, a way to suppress the injection is to form a disturbed layer in which hole recombination will occur [1,31,34,35]. Such a layer is located just beneath the contact and is produced by oxygen implantation without postannealing, preparatory to metallizing.…”

Section: Fabrication Technology For the Sensing Portion Of A Hybrid Dmentioning

confidence: 99%

“…Organic materials, such as polyimides, tend to be used for passivation, although the conventional dielec- trics SiO 2 and S 3 N 4 still serve the purpose [1,4,14,34,35,45].…”

Section: Assembly Of Hybrid Detectorsmentioning

confidence: 99%

“…Actually, it is not always necessary for bumps to be formed on both portions. In some detectors, Pb-Sn bumps are formed only on the readout chip, with bump-pad interlayers made on both [34,35]. However, this practice is not followed with In bumps, in which case bump bonding may be achieved by fusion or cold welding [14,46].…”

Section: Assembly Of Hybrid Detectorsmentioning

confidence: 99%

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GaAs Pixel-Detector Technology for X-ray Medical Imaging: A Review

2005

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An attempt is made to analyze and summarize the literature data on hybrid x-ray GaAs pixel detectors designed for medical imaging. Criteria are stated for selecting a semiconductor material. It is shown that GaAs is currently preferable to the other semiconductor materials. Detector figures of merit used to select a semiconductor material and a process technology are listed. Major types of x-ray detector based on bulk-grown or epitaxial GaAs are described, namely, the planar Schottky, the planar p-i-n, and the 3D detector. The influence is considered of different process steps (contact formation, passivation coating, hybridization, etc.) on detector figures of merit. Monolithic technology is briefly discussed.

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Section: Fabrication Technology For the Sensing Portion Of A Hybrid Dmentioning

confidence: 99%

Section: Fabrication Technology For the Sensing Portion Of A Hybrid Dmentioning

confidence: 99%

“…Organic materials, such as polyimides, tend to be used for passivation, although the conventional dielec- trics SiO 2 and S 3 N 4 still serve the purpose [1,4,14,34,35,45].…”

Section: Assembly Of Hybrid Detectorsmentioning

confidence: 99%

Section: Assembly Of Hybrid Detectorsmentioning

confidence: 99%

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GaAs Pixel-Detector Technology for X-ray Medical Imaging: A Review

2005

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“…This is not acceptable in low-dose medical imaging applications or hard X-ray and γ-ray astronomy. Thus, high Z-materials like GaAs (Z=31/33) were studied [9]- [11] and a very promising material for high absorption sensors is CdTe (Z=48/52). The absorption efficiency of an only 0.5mm thick CdTe sensor is 90% and 30% for X-ray energies of 40…”

mentioning

confidence: 99%

Single photon counting X-ray imaging with Si and CdTe single chip pixel detectors and multichip pixel modules

Löcker¹,

Fischer

Krimmel

et al. 2004

IEEE Trans. Nucl. Sci.

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Hybrid Semiconductor Pixel Detectors for Low‐ and Medium‐EnergyX‐ and Gamma‐Ray Single Photon Imaging Using the Medipix Read‐Out Chip

Russo

2002

Encyclopedia of Imaging Science and Technology

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After a brief description of microstrip and pixel detectors for radiation imaging with X‐rays and gamma‐rays, the functionality, physical response, and imaging performance of the hybrid pixel detectors based on the Medipix1 photon counting chip for such diverse imaging applications such as digital mammography, synchrotron X‐ray radiation, nuclear medicine, and so on are described. It is concluded that such hybrid pixel detectors, originated from high‐energy physics, have great potential for specific scientific and industrial X‐ and gamma‐ray imaging applications and that the fabrication of large detector arrays or mosaic of detectors for large area imaging is still the main open problem with hybrid detectors.

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Comparison of hybrid pixel detectors with Si and GaAs sensors

Cited by 12 publications

References 10 publications

GaAs Pixel-Detector Technology for X-ray Medical Imaging: A Review

GaAs Pixel-Detector Technology for X-ray Medical Imaging: A Review

Single photon counting X-ray imaging with Si and CdTe single chip pixel detectors and multichip pixel modules

Hybrid Semiconductor Pixel Detectors for Low‐ and Medium‐EnergyX‐ and Gamma‐Ray Single Photon Imaging Using the Medipix Read‐Out Chip

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