10th International Conference on Group IV Photonics 2013
DOI: 10.1109/group4.2013.6644437
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Comparison of heater architectures for thermal control of silicon photonic circuits

Abstract: We present a comparison of integrated heaters for silicon photonics, based on doped silicon, silicide and tungsten metallization, with and without trenches and undercut for insulation. Results show similar thermo-optic efficiency, but with electrical resistivities spanning 2 orders of magnitude.

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Cited by 95 publications
(58 citation statements)
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“…4(a)] and recorded the voltage and current values necessary to obtain a πrad phase shift (half FSR in the spectrum profile). From the obtained values we report a πrad phase shift at 20.9mW, which is a result compatible with the reported values for this technology [6].…”
Section: Electrical and Optical Characterizationsupporting
confidence: 91%
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“…4(a)] and recorded the voltage and current values necessary to obtain a πrad phase shift (half FSR in the spectrum profile). From the obtained values we report a πrad phase shift at 20.9mW, which is a result compatible with the reported values for this technology [6].…”
Section: Electrical and Optical Characterizationsupporting
confidence: 91%
“…The high thermo-optic coefficient of silicon (1.8 × 10 −4 K −1 ) makes devices susceptible to temperature variationsvariances [5], and allows efficient tuning of wavelength filters and spectrum shifting [6][7][8][9][10][11]. Although compact, heaters often require large contact pads to connect to external electronics for driving.…”
mentioning
confidence: 99%
“…Active tuning can be performed by incorporating a heater as demonstrated by Li et al [24] or by adding a controllable DC level to the RF drive voltage if the modulator is efficient enough and the tuning range required is sufficiently small [76]. An important consideration is the power consumption of the tuning element itself and therefore the efficiency of the different heater architectures possible [77], and methods to improve the efficiency [78], have attracted increasing research interest recently.…”
Section: Silicon Based Carrier Depletion Modulator For Short Reach Linksmentioning
confidence: 99%
“…The fact that these heaters are in-plane with the optical waveguides offers an advantage over also often used metal heaters that are positioned above the optical waveguide. The reason is that in the case of in-plane heaters the optical waveguide can be wrapped around the heater, which gives an efficiency improvement of at least a factor of 2 without compromising for speed [8]. Figure 1 shows a schematic representation of the phase shifter that has been implemented in the CBC design.…”
Section: Designmentioning
confidence: 99%