Comparison of Effects of Ionizing Radiation and High-Current Stress on Characteristics of Self-Aligned Bipolar Transistors

Chen, T. C.; Norum, J.; Ning, T.H.

doi:10.7567/ssdm.1988.s-iiia-9

Cited by 2 publications

(4 citation statements)

References 5 publications

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“…The bandwidth required to achieve diffractionlimited resolution is inversely proportional to the number of rings (zones) in the zone plates. For example, our zone plate with 40 nm outer zone width and 80 um diameter has , [4] so that a bandwidth of 0.2% is required to achieve diffraction-limited resolution.…”

Section: High-resolution X-ray Imaging With Transmission X-ray Micros...mentioning

confidence: 99%

“…No charging effect and much lower radiation damage than electrons. Devices can remain fully functional when imaged at micrometer to tens of nanometer resolution [2][3][4]. 4.…”

Section: Introductionmentioning

confidence: 99%

“…Devices can remain fully functional when imaged at micrometer to tens of nanometer resolution [2][3][4]. 4. When combined with computed tomography (CT) technique, it produces distortion-free 3D images that represent the devices' full structures, including both surface and internal features [5].…”

Section: Introductionmentioning

confidence: 99%

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In Situ 3D Imaging and Characterization of Nano-Structures with X-ray Nano-CT Technique

Wang

Chen²,

Chiu

2011

ECS Trans.

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High-resolution x-ray microscopy and nano-CT provides a new approach to non-invasively and non-destructively study nano-structures in situ and in operando. Combined with tunable synchrotron x-ray sources, the elemental and certain chemical compositions can also be mapped dynamically in 3D. These capabilities are valuable for studying electrochemical systems, particularly those involving electrochemical reactions with porous structures at tens of nm to micron scale. The paper gives an introduction of this technique with several examples.

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Section: High-resolution X-ray Imaging With Transmission X-ray Micros...mentioning

confidence: 99%

“…No charging effect and much lower radiation damage than electrons. Devices can remain fully functional when imaged at micrometer to tens of nanometer resolution [2][3][4]. 4.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

In Situ 3D Imaging and Characterization of Nano-Structures with X-ray Nano-CT Technique

Wang

Chen²,

Chiu

2011

ECS Trans.

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“…No charging effect and much lower radiation damage than electrons. Devices can often remain fully functional when imaged at micrometer to tens of nanometer resolution (Colangelo, 2002;Sun et al, 1986;Chen et al, 1988). 3.…”

Section: Introductionmentioning

confidence: 99%

High‐Resolution 3DImaging and Material Analysis with TransmissionX‐ray Microscopy and Nano‐CT

Wang

2012

Characterization of Materials

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Lens‐based x‐ray microscopy and nano‐CT is a relatively new approach for imaging and characterizing nanostructures. To date, tens of nanometer resolution in 2D and 3D is routinely achieved with both commercial laboratory systems and instruments based at synchrotron radiation facilities. The nondestructive nature of the technique makes it particularly well suited for in situ studies on dynamic behavior of nanostructures while in or near their real operation conditions. With the use of tunable synchrotron x‐ray sources, the elemental and certain chemical compositions can also be mapped accurately in 3D with 1%‐level sensitivity. This paper provides an introduction to this technique with examples in several application areas.

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Comparison of Effects of Ionizing Radiation and High-Current Stress on Characteristics of Self-Aligned Bipolar Transistors

Cited by 2 publications

References 5 publications

In Situ 3D Imaging and Characterization of Nano-Structures with X-ray Nano-CT Technique

In Situ 3D Imaging and Characterization of Nano-Structures with X-ray Nano-CT Technique

High‐Resolution 3DImaging and Material Analysis with TransmissionX‐ray Microscopy and Nano‐CT

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