High‐Resolution 3DImaging and Material Analysis with TransmissionX‐ray Microscopy and Nano‐CT

Abstract

Lens‐based x‐ray microscopy and nano‐CT is a relatively new approach for imaging and characterizing nanostructures. To date, tens of nanometer resolution in 2D and 3D is routinely achieved with both commercial laboratory systems and instruments based at synchrotron radiation facilities. The nondestructive nature of the technique makes it particularly well suited for in situ studies on dynamic behavior of nanostructures while in or near their real operation conditions. With the use of tunable synchrotron x‐ray sources, the elemental and certain chemical compositions can also be mapped accurately in 3D with 1%‐level sensitivity. This paper provides an introduction to this technique with examples in several application areas.