1992
DOI: 10.1002/sia.740180719
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Comparison of background removal methods for XPS

Abstract: Photoelectron peak areas are measured using various background removal methods. Linear, horizontal, Shirley's and Tougaard's backgrounds have been tested on many spectra for different pass energies in the spectrometer. These four values, obtained for each photoelectron line, are compared together and it is shown that the first three methods give proportional results. These values are then compared to theoretical intensities for five elements (Au, Ag, Cu, Ni, Cr) and one oxide (A1203). These theoretical calcula… Show more

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Cited by 116 publications
(100 citation statements)
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“…In order to compare the DFT density of states to the photoemission spectra, the Shirley background is subtracted from measured valence band spectra to remove the effects of inelastic scattering 21 .…”
Section: Experimental Methodsmentioning
confidence: 99%
“…In order to compare the DFT density of states to the photoemission spectra, the Shirley background is subtracted from measured valence band spectra to remove the effects of inelastic scattering 21 .…”
Section: Experimental Methodsmentioning
confidence: 99%
“…Curve fitting using the PHI Multipak software by assuming Shirley background was done to obtain chemical state information. 43 The acquisition conditions were 23.5eV pass energy, 45…”
Section: Methodsmentioning
confidence: 99%
“…[18][19][20][21][22] Some metals also form nanowires/nanowhiskers after deposition onto silicon and/or carbon based substrates at elevated temperatures. [23][24][25][26] Therefore, developing an understanding of how those specific metals interact with thick carbon films can be beneficial. Information can be gathered on how metals bind to the graphite surface and how this can affect electronic and magnetic properties of both the graphite and the metal.…”
Section: Metals On Graphitementioning
confidence: 99%
“…70 A Shirley background subtraction was used for the majority of peak integrations, as it is ideal for integrating single peaks and small energy ranges. 71,72 Microsoft Excel software was used for numerical analysis and graphing.…”
Section: Data Processing and Analysismentioning
confidence: 99%
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