Comparison between flat aerostatic gas-bearing pads with orifice and porous feedings at high-vacuum conditions

Schenk, Christoph; Buschmann, Stefan; Risse, Stefan; Eberhardt, Ramona; Tünnermann, Andreas

doi:10.1016/j.precisioneng.2008.01.001

Cited by 43 publications

(21 citation statements)

References 7 publications

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“…In formula (5), Q in is the flow rate into the gas film clearance through the orifice, and its expression is expressed by the following formula:…”

Section: Governing Equation Of Gas Lubricationmentioning

confidence: 99%

“…Due to their high accuracy of motion, wide speed range, small amount of friction, lack of pollution, and low heat generation, aerostatic bearings have been widely used in the aerospace industry and the IT chip manufacturing industry, as well as for the manufacturing of ultraprecision equipment and national defense application equipment in addition to other fields and applications [1][2][3]. With the development of precision and ultraprecision technology, higher and more urgent requirements have been proposed for the stiffness, accuracy, and stability of aerostatic bearings [4][5][6]. Due to the compressibility of gases, it is very difficult to improve the bearing capacity and rigidity of aerostatic bearings.…”

Section: Introductionmentioning

confidence: 99%

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Research and Analysis of the Static Characteristics of Aerostatic Bearings with a Multihole Integrated Restrictor

Lü

Zhang

2020

Shock and Vibration

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In order to further study the performance of aerostatic bearing, an aerostatic bearing with a multihole integrated restrictor was proposed in this paper. Based on the physical model of aerostatic bearings, the governing equation was established, deduced discretely, and solved numerically by the finite-difference method and flow balance principle in Cartesian coordinates. The bearing capacity and stiffness of aerostatic bearings have been analyzed, and the relevant experimental research has been carried out in this paper. The results showed that the number of orifices in the integrated restrictor had a significant effect on the bearing capacity, and the maximum bearing capacity of a nine-hole integrated throttling bearing was approximately 1.9 times greater than that of a single-hole bearing. The bearing stiffness was greatly affected by the diameter of the orifices, and the optimum bearing stiffness was determined. The corresponding gas film clearance also changed accordingly.

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“…In formula (5), Q in is the flow rate into the gas film clearance through the orifice, and its expression is expressed by the following formula:…”

Section: Governing Equation Of Gas Lubricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Research and Analysis of the Static Characteristics of Aerostatic Bearings with a Multihole Integrated Restrictor

Lü

Zhang

2020

Shock and Vibration

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“…Lee et al [30] examined the correlation between inlet pressure, the rate of air flow, and the floating height of the glass to gain a deeper understanding of the distribution of pressure beneath the substrate and the means by which this is influenced by the permeability of porous materials. A few papers provide also some comparisons between bearings with different orifices and with porous feeding systems [31,32]. To reduce the levitation height and to improve the stiffness of the suspension, negative pressure areas can be distributed throughout the whole surface [33].…”

Section: Air-bearing Surfacesmentioning

confidence: 99%

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Laurent

Moon

2015

Intel Serv Robotics

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Many manipulation systems using air flow have been proposed for object handling in a non-prehensile way and without solid-to-solid contact. Potential applications include high-speed transport of fragile and clean products and high-resolution positioning of thin delicate objects. This paper discusses a comprehensive survey of state-of-the-art pneumatic manipulation from the macro scale to the micro scale. The working principles and actuation methods of previously developed air-bearing surfaces, ultra-sonic bearing surfaces, air-flow manipulators, air-film manipulators, and tilted air-jet manipulators are reviewed with a particular emphasis on the modeling and the control issues. The performance of the previously developed devices are compared quantitatively and open problems in pneumatic manipulation are discussed.

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“…Common applications of air bearings include profile projection equipment employing air bearing slides, rotary measuring tables, and machine tool lead screw measuring heads . There are many other unusual applications such as interferometric measurement tools, EUV exposure tools or several semiconductor inspection tools that work in high‐vacuum conditions and frictionless compression testing of soft materials at high strains using load‐applying platens made from porous graphite aerostatic bearings which minimizes the friction at the interface of sample and the platens …”

Section: Introductionmentioning

confidence: 99%

Evaluation of Compacted Cementitious Composites for Porous Bearings

Panzera

Christofóro

Rubio

et al. 2012

Int J Applied Ceramic Tech

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The use of porous materials as a restrictor in aerostatic bearings provides many advantages over conventional restrictors, such as small variation of temperature, high damping, high operational speeds, limited wear, and capacity to support radial, axial, and combined loading. A design of experiment (DOE) was carried out to evaluate cold-pressed cementitious composites as an air restrictor in thrust bearings. The physical and mechanical properties such as the apparent porosity, permeability, and elastic modulus were investigated in this work, thus verifying the structural and flow characteristics of the composites for such application. The composites fabricated with low compacting pressure and small silica particles provided the material requirements for porous bearings.

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Comparison between flat aerostatic gas-bearing pads with orifice and porous feedings at high-vacuum conditions

Cited by 43 publications

References 7 publications

Research and Analysis of the Static Characteristics of Aerostatic Bearings with a Multihole Integrated Restrictor

Research and Analysis of the Static Characteristics of Aerostatic Bearings with a Multihole Integrated Restrictor

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Evaluation of Compacted Cementitious Composites for Porous Bearings

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