Comparative study of RF reactive magnetron sputtering and sol-gel deposition of UV induced superhydrophilic TiOx thin films

Vrakatseli, V E; Amanatides, E.; Mataras, D.

doi:10.1088/1742-6596/700/1/012039

Cited by 4 publications

(3 citation statements)

References 15 publications

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“…As also reported for other photoactive, low-dimensional metal oxide nanomaterials, the superhydrophobic character of the surfaces can be recovered by heating, dark storage during a few weeks, or in a low vacuum overnight. [33][34][35][36][37] These results open the path for the use of the TiO 2 nanomembranes as photonic microfluidic valves for the selection of liquids under light activation and as self-cleaning membranes or sensors, which can be further used for photocatalytic removal of water pollutants. [38] 2.5.…”

Section: Photoactivation Of 3d Nanomembranes For a Selective Control Wettingmentioning

confidence: 91%

Plasma‐Assisted Deposition of TiO₂ 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning

Montes

Román

García‐Casas

et al. 2021

Adv Materials Inter

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Fabrication of tunable wetting surfaces is sought for the last years given its importance on energy, biomaterials and antimicrobials, water purification, microfluidics, and smart surfaces. Liquid management on surfaces mainly depends on the control at the micro‐ and nanoscale of both roughness and chemical composition. Herein, the combination of a soft‐template method and plasma‐enhanced chemical vapor deposition is presented for the synthesis of TiO2 nanofibers on porous substrates such as cellulose and stainless‐steel membranes. The protocol, carried out under mild conditions, produces 3D nanomembranes with superhydrophobicity and oleophilicity that are tested as microliter water/oil filters. Photoactivation of TiO2 by UV illumination provides a straightforward approach for wetting tunability that converts the surface into amphiphilic. A final chemical modification of the TiO2 nanofibers by embedding them in an elastomeric polymeric shell and by fluorine‐based grafting opens the path toward the formation of superomniphobic and self‐cleaning surfaces with long‐lasting lifetimes. Thus, a reliable procedure is demonstrated for the fabrication of TiO2 nanofibers, which allows the modification of porous supports and provides an innovative route for the development of 3D nanomembranes with under design wetting. This protocol is extendable to alternative metal oxides, metals, and core@shell nanoarchitectures with potential multifunctionalities.

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Section: Photoactivation Of 3d Nanomembranes For a Selective Control Wettingmentioning

confidence: 91%

Plasma‐Assisted Deposition of TiO₂ 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning

Montes

Román

García‐Casas

et al. 2021

Adv Materials Inter

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“…are simple and economic for the deposition of high-surface-area porous TiO 2 films, but they suffer from mechanical instabilities and residual impurities, low crystallinity, and poorer wetting properties, unless the films are post annealed at high temperature [ 6 , 7 ]. RF/DC magnetron sputtering is a versatile vapor deposition method exhibiting remarkable results in the low-temperature deposition of crystalline thin films and is also suitable for large-area depositions [ 8 , 9 , 10 , 11 ]. In the absence of substrate heating, a crystalline structure is obtained due to the electron and ion bombardment during deposition, which provides a sufficient amount of energy for crystallization but does not severely raise the temperature of the bulk substrate.…”

Section: Introductionmentioning

confidence: 99%

“…In the absence of substrate heating, a crystalline structure is obtained due to the electron and ion bombardment during deposition, which provides a sufficient amount of energy for crystallization but does not severely raise the temperature of the bulk substrate. Both rutile and anatase TiO 2 thin films have been deposited on unheated substrates by tuning different magnetron sputtering process parameters [ 8 , 9 , 10 , 11 ]. Room-temperature deposition of the anatase phase has been accomplished at elevated total and/or oxygen partial pressure [ 10 , 12 , 13 , 14 , 15 ], at larger target-to-substrate distances [ 11 ], or on a crystalline substrate [ 16 ].…”

Section: Introductionmentioning

confidence: 99%

Glancing Angle Deposition Effect on Structure and Light-Induced Wettability of RF-Sputtered TiO2 Thin Films

et al. 2018

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Crystalline TiO2 films were prepared on unheated glass substrates by radio frequency (RF) reactive magnetron sputtering at normal angle of incidence (a = 0°) and at glancing angle (a = 87°). The effect of the glancing angle on the structure, microstructure, and wetting properties of the films was investigated. The inclination of the substrate led to phase transformation of the deposited films from rutile to either rutile/anatase or anatase, depending on the working pressure. Extreme shadowing at 87° results in a remarkable increase of the films’ porosity and surface roughness. The mechanism of the glancing-angle-induced crystalline phase formation is thoroughly discussed based on the thermodynamic, kinetic, and geometrical aspects of the nucleation and is related with the microstructural changes. Both crystalline phase and microstructure significantly affect the wetting properties of the TiO2 films. Glancing-angle-deposited anatase TiO2 exhibits a high degree of porosity and roughness, a high rate of UV-induced wettability conversion, and a long-term highly hydrophilic nature in dark. Therefore, anatase TiO2 is potentially a good candidate for applications as dye-sensitized solar cells (DSSC)/perovskite solar cells, microfluidic devices, and self-cleaning surfaces prepared on thermosensitive substrates.

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Synthesis and Characterization of Tio2 Thin Films for Photovoltaic and Optoelectronic Applications

et al. 2020

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Comparative study of RF reactive magnetron sputtering and sol-gel deposition of UV induced superhydrophilic TiOx thin films

Cited by 4 publications

References 15 publications

Plasma‐Assisted Deposition of TiO₂ 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning

Plasma‐Assisted Deposition of TiO₂ 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning

Glancing Angle Deposition Effect on Structure and Light-Induced Wettability of RF-Sputtered TiO2 Thin Films

Synthesis and Characterization of Tio2 Thin Films for Photovoltaic and Optoelectronic Applications

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Comparative study of RF reactive magnetron sputtering and sol-gel deposition of UV induced superhydrophilic TiOx thin films

Cited by 4 publications

References 15 publications

Plasma‐Assisted Deposition of TiO2 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning

Plasma‐Assisted Deposition of TiO2 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning

Glancing Angle Deposition Effect on Structure and Light-Induced Wettability of RF-Sputtered TiO2 Thin Films

Synthesis and Characterization of Tio2 Thin Films for Photovoltaic and Optoelectronic Applications

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Product

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Plasma‐Assisted Deposition of TiO₂ 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning

Plasma‐Assisted Deposition of TiO₂ 3D Nanomembranes: Selective Wetting, Superomniphobicity, and Self‐Cleaning