Articles you may be interested inThermal annealing effects on photoluminescence properties of carbon-doped silicon-rich oxide thin films implanted with erbium Photoluminescence and positron annihilation spectroscopy investigation of (Ge, Er) codoped Si oxides deposited by magnetron sputtering Effect of ion-irradiation induced defects on the nanocluster Si ∕ Er 3 + coupling in Er-doped silicon-rich silicon oxide Appl. Phys. Lett. 91, 021909 (2007); 10.1063/1.2752538Defects in 30 keV Er + -implanted SiO 2 /Si studied by positron annihilation and cathodoluminescence Amorphous erbium-doped silicon oxide ͑Si y O 1−y :Er, y Ն 1 / 3͒ thin films are currently under investigation as a luminescent material system for complementary metal-oxide semiconductor compatible light emitters. We have grown films with y Ϸ 1 / 3 and investigated their properties using both positron annihilation and photoluminescence ͑PL͒ spectroscopies. Films were characterized "as deposited," following irradiation with 1 MeV Si + ions and after isochronal annealing. The PL yield from both Er 3+ ions and sensitizing defects is reduced by irradiation, depending strongly on the irradiation fluence and reaching saturation at ϳ4 ϫ 10 13 Si + / cm 2 . Higher implantation fluences result in an open-volume defect structure in the film that persists after annealing. This annealing behavior is similar to that of an unrecoverable quenching effect on Er 3+ -related PL near 1540 nm, and we suggest that these open-volume defects may cause a decoupling of the Er 3+ ions from sensitizing oxide point defects that form as a result of the film deposition process.