Comparative investigation of Si-C-N Films prepared by plasma enhanced chemical vapour deposition and magnetron sputtering

Kozak, A.O.; Porada, O. K.; Иващенко, В. И.; Ivashchenko, L. A.; Scrynskyy, P.L.; Томила, T. В.; Manzhara, V.S.

doi:10.1016/j.apsusc.2017.06.332

Cited by 31 publications

(16 citation statements)

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“…Amorphous Si–C–N materials are receiving high worldwide interest due to a combination of technologically important properties. The properties of interest range from high hardness and other mechanical properties − through wide band gap and the resulting optical transmittance to photoluminescence, dielectric constant, or absorbance of electromagnetic waves . Furthermore, Si–C–N can exhibit very high (and extremely high after slight boron incorporation) thermal stability and oxidation resistance. ,− The properties are sometimes understood as a combination of or compared with those of the binary crystalline phases SiC, Si 3 N 4 , and C 3 N 4 .…”

Section: Introductionmentioning

confidence: 99%

“…While the first two of them are stable and known for their mechanical as well as electrical properties, β-C 3 N 4 (isostructural with β-Si 3 N 4 ) is a metastable phase that was predicted to be superhard . The Si–C–N materials are prepared in various ways ranging from thin films prepared by reactive magnetron sputtering of both Si and C − or only Si in C-containing plasma, through thin films prepared by chemical vapor deposition, , to polymer-derived powders and pellets of fibers …”

Section: Introductionmentioning

confidence: 99%

“…While the first two of them are stable and known for their mechanical as well as electrical properties, β-C 3 N 4 (isostructural with β-Si 3 N 4 ) is a metastable 13 phase that was predicted to be superhard. 14 The Si−C−N materials are prepared in various ways ranging from thin films prepared by reactive magnetron sputtering of both Si and C 3−8 or only Si in C-containing plasma, 1 through thin films prepared by chemical vapor deposition, 3,15 to polymer-derived powders 10 and pellets 2 of fibers. 9 The properties of amorphous Si−C−N are largely given by the contents of individual elements ([Si], [C], and [N] total not to be confused with [N] network defined below), given in atom % throughout this work.…”

Section: Introductionmentioning

confidence: 99%

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Maximum Achievable N Content in Atom-by-Atom Growth of Amorphous Si–C–N

Houška

2020

ACS Appl. Mater. Interfaces

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The maximum achievable N content in atom-byatom growth of Si−C−N films is examined by combining ab initio molecular dynamics simulations in a wide range of compositions and densities with experimental data. When and only when the simulation algorithm allows the formation and final presence of N 2 molecules, the densities leading to the deepest local energy minima are in agreement with the experiment. The main attention is paid to unbonded N 2 molecules, with the aim to predict and explain the maximum content of N bonded in the amorphous networks. There are significant differences resulting from different compositions, ranging from no N 2 at the lowest energy density of a-Si 3 N 4 (57 atom % of bonded N) to many N 2 at the lowest energy density of a-C 3 N 4 (42 atom % of bonded N). The theoretical prediction is in agreement with the experimental results of reactive magnetron sputtering at varied Si+C sputter target compositions and N 2 partial pressures. A detailed analysis reveals that while there is a relationship between the N 2 formation and the packing factor, which is valid in the whole compositional range investigated, the lowest-energy packing factor depends on the composition. The results are important for the explanation of experimentally reported maximum N contents, design of technologically important amorphous nitrides and pathways of their preparation, prediction of their stability, and identification of what may or may not be achieved in this field. KEYWORDS: N content, N 2 formation, Si−C−N, C 3 N 4 , Si 3 N 4 , CN x , ab initio, molecular dynamics

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Maximum Achievable N Content in Atom-by-Atom Growth of Amorphous Si–C–N

Houška

2020

ACS Appl. Mater. Interfaces

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“…It must be particularly noted that the referred all-vapor-phase processing method plays an important role in coating such a thin shell. In contrast to other reported synthetic approaches, such as the traditional hydrothermal route, electron beam evaporation, magnetron sputtering, and chemical vapor deposition, the synthesis method presented in this article features low cost, simple operation, uniform membrane thickness, and elemental distribution. − Hence, the proposed coating method will provide a cost-effective approach to produce thin shells in future sensing applications. Then, transient responses of the sensors composed of α-Fe 2 O 3 NOs or N–C@α-Fe 2 O 3 NOs (3 nm) for the TEA concentration within the range of 1–200 ppm in dry air are studied and given in Figure b.…”

Section: Resultsmentioning

confidence: 99%

From a Relatively Hydrophobic and Triethylamine (TEA) Adsorption-Selective Core–Shell Heterostructure to a Humidity-Resistant and TEA Highly Selective Sensing Prototype: An Alternative Approach to Improve the Sensing Characteristics of TEA Sensors

Shao

Wang

et al. 2020

ACS Sens.

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During the detection of industrial toxic gases, such as triethylamine (TEA), poor selectivity and negative humidity impact are still challenging issues. A frequently reported strategy is to employ molecular sieves or metal–organic framework (MOF) membranes so that interference derived from surrounding gases or water vapor can be blocked. Nevertheless, the decline in the response signal was also observed after coating these membranes. Herein, an alternative strategy that is based on a hydrophobic, TEA adsorption-selective p–n conjunction core–shell heterostructure is proposed and is speculated to simultaneously enhance selectivity, sensitivity, and humidity resistance. To verify the practicability of the proposed strategy, a thickness-tunable nitrogen-doped carbon (N–C) shell-coated α-Fe2O3 nano-olive (N–C@α-Fe2O3 NO)-based core–shell heterostructure that is obtained via a unique all-vapor-phase processing method is selected as the research example. After forming the core–shell heterostructure, a relatively hydrophobic and TEA adsorption-selective N–C@α-Fe2O3 NO surface was experimentally confirmed. Particularly, a chemiresistive sensor that comprises N–C@α-Fe2O3 NOs exhibits satisfactory selectivity and response magnitude to TEA when compared with the sensor using α-Fe2O3 NOs. The detection limit can even reduce to be 400 ppb at 250 °C. Furthermore, the sensor based on N–C@α-Fe2O3 NOs shows desirable humidity resistance within the relative humidity (RH) range of 30–90%. For practical usage, a sensing prototype based on the N–C@α-Fe2O3 NO probe is fabricated, and its satisfactory sensing performance further confirms the potential for future applications in industrial organic amine detection. These promising results show a bright future in enhancing the humidity resistance and selectivity as well as sensitivity of chemiresistive sensors by simply designing a hydrophobic and target gas adsorption (e.g., TEA) preferred p–n junction core–shell heterostructure.

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“…In Figure 4d, a broad N 1s peak in region of 396–402 eV with a maximum located at a binding energy of 399.7 eV is clearly identified for the inhibitor sample. Two Gaussian–Lorentzian peaks of the high-resolution N 1s spectrum exist: One at a binding energy of 399.0 eV that could be attributed to the type of C–N bond [34], and the other at 400 eV that could be assigned to the bond of N adsorbed on the carbon steel surface [35]. In comparison, no obvious N 1s peak is detected in the blank sample.…”

Section: Resultsmentioning

confidence: 99%

Effect of Inhibitor on Adsorption Behavior and Mechanism of Micro-Zone Corrosion on Carbon Steel

Wang

Zhang

et al. 2019

Materials

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A new type of inhibitor is studied in this paper. Inhibition efficiency and adsorption behavior of an inhibitor film on the steel surface is tested via the electrochemical method and theoretical calculation to establish the adsorption model. Test results confirm that inhibition efficiency is improved with the addition of an inhibitor, and the inhibitor film is formed firmly by comparing the characteristic peaks of S and N. Moreover, the micro-zone corrosion progress of Fe in 3.5% invasive NaCl-simulated seawater environment is studied. The results further show that corrosion is initiated under the zone without the inhibitor film, while it is prevented under the protection of the film. By the experiments, it is shown that inhibitor can be adsorbed on the surface of steel stably and has excellent protection performance for reinforced rebar, which can be widely used in concrete structure.

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Comparative investigation of Si-C-N Films prepared by plasma enhanced chemical vapour deposition and magnetron sputtering

Cited by 31 publications

References 31 publications

Maximum Achievable N Content in Atom-by-Atom Growth of Amorphous Si–C–N

Maximum Achievable N Content in Atom-by-Atom Growth of Amorphous Si–C–N

From a Relatively Hydrophobic and Triethylamine (TEA) Adsorption-Selective Core–Shell Heterostructure to a Humidity-Resistant and TEA Highly Selective Sensing Prototype: An Alternative Approach to Improve the Sensing Characteristics of TEA Sensors

Effect of Inhibitor on Adsorption Behavior and Mechanism of Micro-Zone Corrosion on Carbon Steel

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